Zhang, Y., Ding, Y., & Christofides, P. D. (2019). Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design. Chemical engineering research & design, 147, 529-544. https://doi.org/10.1016/j.cherd.2019.05.049
Citace podle Chicago (17th ed.)Zhang, Yichi, Yangyao Ding, a Panagiotis D. Christofides. "Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Deposition with Application to Chamber Design." Chemical Engineering Research & Design 147 (2019): 529-544. https://doi.org/10.1016/j.cherd.2019.05.049.
Citace podle MLA (9th ed.)Zhang, Yichi, et al. "Multiscale Computational Fluid Dynamics Modeling of Thermal Atomic Layer Deposition with Application to Chamber Design." Chemical Engineering Research & Design, vol. 147, 2019, pp. 529-544, https://doi.org/10.1016/j.cherd.2019.05.049.