Application of a novel local and automatic PCA algorithm for diffraction pattern denoising in TEM-ASTAR analysis in microelectronics

•PCA denoising of TEM-ASTAR dataset improves post-treatment analysis.•Automatic thresholding of PCA using theoretical noise matrix's spectrum.•Locality of the algorithm aligned to localized nature of crystallographic grains.•Reduction of data acquisition times by a factor of five maintaining an...

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Bibliographic Details

Published in:	Ultramicroscopy Vol. 267; p. 114059
Main Authors:	Printemps, Tony, Dabertrand, Karen, Vives, Jérémy, Valery, Alexia
Format:	Journal Article
Language:	English
Published:	Netherlands Elsevier B.V 01.12.2024
Subjects:	ACOM-TEM ASTAR Denoising Diffraction pattern Marchenko-Pastur PCA ACOM-TEM Marchenko-Pastur ASTAR Diffraction pattern Denoising PCA
ISSN:	0304-3991, 1879-2723, 1879-2723
Online Access:	Get full text
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