Using intelligent technology and real-time feedback algorithm to improve manufacturing process in IoT semiconductor industry

To enable the Internet of things, the semiconductor manufacturing process has progressed from the micron to the deep submicron level. Quality improvement is one of the great challenges in wafer fabrication. Computer-integrated manufacturing (CIM) has arisen as a means by which to reduce wafer rework...

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Bibliographic Details
Published in:	The Journal of supercomputing Vol. 77; no. 5; pp. 4639 - 4658
Main Authors:	Li, Bin, Chen, Ruey-Shun, Liu, C.-Y.
Format:	Journal Article
Language:	English
Published:	New York Springer US 01.05.2021 Springer Nature B.V
Subjects:	Algorithms Business competition Cluster analysis Clustering Compilers Computer integrated manufacturing Computer Science Data mining Data processing Deep Learning in IoT: Emerging Trends and Applications - 2019 Feedback control Flexibility Foundries Internet of Things Interpreters Manufacturing Process controls Process parameters Processor Architectures Production costs Programming Languages Real time Statistical process control Technology assessment Vector quantization Intelligent technology Real-time feedback algorithm Manufacturing process Internet of things (IoT) Semiconductor industry
ISSN:	0920-8542, 1573-0484
Online Access:	Get full text
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