Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator

This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these...

Full description

Saved in:

Bibliographic Details
Published in:	Journal of microelectromechanical systems Vol. 30; no. 1; pp. 15 - 23
Main Authors:	Tsukamoto, Takashiro, Tanaka, Shuji
Format:	Journal Article
Language:	English
Published:	New York IEEE 01.02.2021 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Compensators Damping Demodulation Feedback control Field programmable gate arrays Gyroscopes Linearity MEMS gyroscope Micromechanical devices Oscillators Programmable controllers Q-factor Rate integrating gyroscope Resonant frequency Resonators Separators Signal generators whole angle mode
ISSN:	1057-7157, 1941-0158
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Be the first to leave a comment!