Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator

This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these...

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Veröffentlicht in:	Journal of microelectromechanical systems Jg. 30; H. 1; S. 15 - 23
Hauptverfasser:	Tsukamoto, Takashiro, Tanaka, Shuji
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 01.02.2021 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Compensators Damping Demodulation Feedback control Field programmable gate arrays Gyroscopes Linearity MEMS gyroscope Micromechanical devices Oscillators Programmable controllers Q-factor Rate integrating gyroscope Resonant frequency Resonators Separators Signal generators whole angle mode
ISSN:	1057-7157, 1941-0158
Online-Zugang:	Volltext
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