Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator
This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these...
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| Vydáno v: | Journal of microelectromechanical systems Ročník 30; číslo 1; s. 15 - 23 |
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| Médium: | Journal Article |
| Jazyk: | angličtina |
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New York
IEEE
01.02.2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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| ISSN: | 1057-7157, 1941-0158 |
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| Abstract | This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases and amplitudes of driving signals. A control system including the mode separator, feedback controllers, signal generators, mismatch compensators were implemented in a field programmable gate array (FPGA). Using the proposed mismatch compensation technique, the equivallent aniso-damping term became 1/100. As a result, the scale factor became constant and the non-linearity became less than 0.2% even when the slow angular rate region around 5°/s. In addition, the temperature coefficient of scale factor as small as −1.84 ± 0.62 ppm/K was achieved without any temperature correction. [2020-0011] |
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| AbstractList | This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases and amplitudes of driving signals. A control system including the mode separator, feedback controllers, signal generators, mismatch compensators were implemented in a field programmable gate array (FPGA). Using the proposed mismatch compensation technique, the equivallent aniso-damping term became 1/100. As a result, the scale factor became constant and the non-linearity became less than 0.2% even when the slow angular rate region around 5°/s. In addition, the temperature coefficient of scale factor as small as −1.84 ± 0.62 ppm/K was achieved without any temperature correction. [2020-0011] |
| Author | Tsukamoto, Takashiro Tanaka, Shuji |
| Author_xml | – sequence: 1 givenname: Takashiro orcidid: 0000-0002-7614-7717 surname: Tsukamoto fullname: Tsukamoto, Takashiro email: t_tsuka@mems.mech.tohoku.ac.jp organization: Department of Robotics, Graduate School of Engineering, Tohoku University, Sendai, Japan – sequence: 2 givenname: Shuji orcidid: 0000-0002-2663-3266 surname: Tanaka fullname: Tanaka, Shuji organization: Department of Robotics, Graduate School of Engineering, Tohoku University, Sendai, Japan |
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| SubjectTerms | Compensators Damping Demodulation Feedback control Field programmable gate arrays Gyroscopes Linearity MEMS gyroscope Micromechanical devices Oscillators Programmable controllers Q-factor Rate integrating gyroscope Resonant frequency Resonators Separators Signal generators whole angle mode |
| Title | Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator |
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