Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator

This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of microelectromechanical systems Jg. 30; H. 1; S. 15 - 23
Hauptverfasser: Tsukamoto, Takashiro, Tanaka, Shuji
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York IEEE 01.02.2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:
Compensators
Damping
Demodulation
Feedback control
Field programmable gate arrays
Gyroscopes
Linearity
MEMS gyroscope
Micromechanical devices
Oscillators
Programmable controllers
Q-factor
Rate integrating gyroscope
Resonant frequency
Resonators
Separators
Signal generators
whole angle mode
ISSN:1057-7157, 1941-0158
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases and amplitudes of driving signals. A control system including the mode separator, feedback controllers, signal generators, mismatch compensators were implemented in a field programmable gate array (FPGA). Using the proposed mismatch compensation technique, the equivallent aniso-damping term became 1/100. As a result, the scale factor became constant and the non-linearity became less than 0.2% even when the slow angular rate region around 5°/s. In addition, the temperature coefficient of scale factor as small as −1.84 ± 0.62 ppm/K was achieved without any temperature correction. [2020-0011]
Bibliographie:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2020.3039241