Stability of Metal Oxide Semiconductor Gas Sensors: A Review

Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detecti...

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Veröffentlicht in:IEEE sensors journal Jg. 22; H. 6; S. 5470 - 5481
Hauptverfasser: Chai, Hongfeng, Zheng, Zichen, Liu, Kewei, Xu, Jinyong, Wu, Kaidi, Luo, Yifan, Liao, Hanlin, Debliquy, Marc, Zhang, Chao
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York IEEE 15.03.2022
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:
Adsorption
Environmental monitoring
Gas detectors
gas sensor
Gas sensors
metal oxide
Metal oxide semiconductors
Metal oxides
Metals
R&D
Research & development
Semiconductor
Sensor arrays
Sensors
stability
Stability criteria
Temperature sensors
Thermal stability
Toxicity
ISSN:1530-437X, 1558-1748
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Zusammenfassung:Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detection in the modern electronic information age. This article reviews the research advances on the stability of metal oxide semiconductor gas sensors in the past five years. The impact of structure, environment, toxicity and sensor array on the sensor stability are discussed. Then, the improvement schemes of existing materials and structure design are summarized. The achievements of structure doping, humidity, anti-poisoning and photoactivation are overviewed. Finally, the great significance of elucidating the sensing mechanism and carrying out the life acceleration test for future research and development is pointed out.
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ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2022.3148264