Stability of Metal Oxide Semiconductor Gas Sensors: A Review

Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detecti...

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Veröffentlicht in:	IEEE sensors journal Jg. 22; H. 6; S. 5470 - 5481
Hauptverfasser:	Chai, Hongfeng, Zheng, Zichen, Liu, Kewei, Xu, Jinyong, Wu, Kaidi, Luo, Yifan, Liao, Hanlin, Debliquy, Marc, Zhang, Chao
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 15.03.2022 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Adsorption Environmental monitoring Gas detectors gas sensor Gas sensors metal oxide Metal oxide semiconductors Metal oxides Metals R&D Research & development Semiconductor Sensor arrays Sensors stability Stability criteria Temperature sensors Thermal stability Toxicity
ISSN:	1530-437X, 1558-1748
Online-Zugang:	Volltext
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Abstract	Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detection in the modern electronic information age. This article reviews the research advances on the stability of metal oxide semiconductor gas sensors in the past five years. The impact of structure, environment, toxicity and sensor array on the sensor stability are discussed. Then, the improvement schemes of existing materials and structure design are summarized. The achievements of structure doping, humidity, anti-poisoning and photoactivation are overviewed. Finally, the great significance of elucidating the sensing mechanism and carrying out the life acceleration test for future research and development is pointed out.
AbstractList	Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detection in the modern electronic information age. This article reviews the research advances on the stability of metal oxide semiconductor gas sensors in the past five years. The impact of structure, environment, toxicity and sensor array on the sensor stability are discussed. Then, the improvement schemes of existing materials and structure design are summarized. The achievements of structure doping, humidity, anti-poisoning and photoactivation are overviewed. Finally, the great significance of elucidating the sensing mechanism and carrying out the life acceleration test for future research and development is pointed out.
Author	Chai, Hongfeng Wu, Kaidi Luo, Yifan Zheng, Zichen Liu, Kewei Debliquy, Marc Zhang, Chao Liao, Hanlin Xu, Jinyong
Author_xml	– sequence: 1 givenname: Hongfeng surname: Chai fullname: Chai, Hongfeng organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 2 givenname: Zichen surname: Zheng fullname: Zheng, Zichen organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 3 givenname: Kewei surname: Liu fullname: Liu, Kewei organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 4 givenname: Jinyong surname: Xu fullname: Xu, Jinyong organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 5 givenname: Kaidi surname: Wu fullname: Wu, Kaidi organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 6 givenname: Yifan surname: Luo fullname: Luo, Yifan organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China – sequence: 7 givenname: Hanlin surname: Liao fullname: Liao, Hanlin organization: ICB UMR 6303, CNRS, University Bourgogne Franche-Comté, University of Technology of Belfort-Montbéliard (UTBM), Belfort, France – sequence: 8 givenname: Marc surname: Debliquy fullname: Debliquy, Marc organization: Service de Science des Matériaux, Faculté Polytechnique, University of Mons, Mons, Belgium – sequence: 9 givenname: Chao orcidid: 0000-0003-2346-6770 surname: Zhang fullname: Zhang, Chao email: zhangc@yzu.edu.cn organization: College of Mechanical Engineering, Yangzhou University, Yangzhou, China
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Snippet	Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors...
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SubjectTerms	Adsorption Environmental monitoring Gas detectors gas sensor Gas sensors metal oxide Metal oxide semiconductors Metal oxides Metals R&D Research & development Semiconductor Sensor arrays Sensors stability Stability criteria Temperature sensors Thermal stability Toxicity
Title	Stability of Metal Oxide Semiconductor Gas Sensors: A Review
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