Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sources

This paper reports on a novel miniaturized deposition technique based on micro-hotplates which are used as microevaporation sources (MES) for a localized deposition of thin films and nanoparticles. The feasibility of this small-scale deposition technique and its general properties are shown for depo...

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Veröffentlicht in:Journal of microelectromechanical systems Jg. 20; H. 1; S. 21 - 27
Hauptverfasser: Meyer, R, Hamann, S, Ehmann, M, König, Dennis, Thienhaus, S, Savan, A, Ludwig, A
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York, NY IEEE 01.02.2011
Institute of Electrical and Electronics Engineers
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:
Biomembranes
Cross-disciplinary physics: materials science; rheology
Deposition
Electron microscopy
Exact sciences and technology
Feasibility
Film condensation
Fluid dynamics
Fundamental areas of phenomenology (including applications)
Heating
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Mechanical instruments, equipment and techniques
Methods of deposition of films and coatings; film growth and epitaxy
microelectromechanical devices
Microelectromechanical systems
Micromechanical devices and systems
Nanoparticles
Nanoscale materials and structures: fabrication and characterization
Physics
Rarefied gas dynamics
Silicon
Silver
Substrates
Temperature measurement
Thin films
microelectromechanical devices
Knudsen flow
Sample size
Vapor condensation
Experimental study
Electron microscopy
Deposition process
Thin films
Nanoparticles
Silver
Transmission electron microscopy
Knudsen number
Heating elements
Microelectromechanical device
ISSN:1057-7157, 1941-0158
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Beschreibung
Zusammenfassung:This paper reports on a novel miniaturized deposition technique based on micro-hotplates which are used as microevaporation sources (MES) for a localized deposition of thin films and nanoparticles. The feasibility of this small-scale deposition technique and its general properties are shown for depositions of Ag on unpatterned and microstructured substrates. The deposited films are rotationally symmetric and show a distinct lateral thickness change. We take advantage of this latter effect, as, e.g., all stages of film condensation can be observed within one experiment on one sample, in a size suitable for transmission electron microscopy investigations. For realizing the most laterally confined depositions, a micro-Knudsen cell was used. It is shown that the use of MES is also very suitable for the fabrication and deposition of nanoparticles.
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2010.2090506