Meyer, R., Hamann, S., Ehmann, M., König, D., Thienhaus, S., Savan, A., & Ludwig, A. (2011). Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sources. Journal of microelectromechanical systems, 20(1), 21-27. https://doi.org/10.1109/JMEMS.2010.2090506
Chicago-Zitierstil (17. Ausg.)Meyer, R., S. Hamann, M. Ehmann, Dennis König, S. Thienhaus, A. Savan, und A. Ludwig. "Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sources." Journal of Microelectromechanical Systems 20, no. 1 (2011): 21-27. https://doi.org/10.1109/JMEMS.2010.2090506.
MLA-Zitierstil (9. Ausg.)Meyer, R., et al. "Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sources." Journal of Microelectromechanical Systems, vol. 20, no. 1, 2011, pp. 21-27, https://doi.org/10.1109/JMEMS.2010.2090506.