The Influence of Top and Bottom Metal Electrodes on Ferroelectricity of Hafnia

In recent years, several experimental approaches have been adopted to study and understand the mechanism and improve the ferroelectricity of fluorite-type hafnia-based ferroelectric materials. In this regard, significant efforts have been made to elucidate the role of top electrode and bottom electr...

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Veröffentlicht in:	IEEE transactions on electron devices Jg. 68; H. 2; S. 523 - 528
Hauptverfasser:	Lee, Yongsun, Goh, Youngin, Hwang, Junghyeon, Das, Dipjyoti, Jeon, Sanghun
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 01.02.2021 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Annealing Capacitors Electric fields Electrode Electrode materials Electrode polarization Electrodes ferroelectric Ferroelectric materials Ferroelectricity Fluorite Hafnium oxide HZO interfacial dead layer Photoelectrons Residual stress Residual stresses Stress Stress analysis Tensile stress Thermal expansion Tin X ray photoelectron spectroscopy
ISSN:	0018-9383, 1557-9646
Online-Zugang:	Volltext
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