A 1.2-V 8.3-nJ CMOS Humidity Sensor for RFID Applications

This paper presents a fully integrated CMOS humidity sensor for a smart RFID sensor platform. The sensing element is a CMOS-compatible capacitive humidity sensor, which consists of top-metal finger-structure electrodes covered by a humidity-sensitive polyimide layer. Its humidity-sensitive capacitan...

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Veröffentlicht in:	IEEE journal of solid-state circuits Jg. 48; H. 10; S. 2469 - 2477
Hauptverfasser:	Zhichao Tan, Daamen, Roel, Humbert, Aurelie, Ponomarev, Youri V., Youngcheol Chae, Pertijs, Michiel A. P.
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York, NY IEEE 01.10.2013 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Amplifiers Applied sciences Capacitance Capacitance-to-digital converter capacitive-sensor interface Capacitors Circuit properties CMOS CMOS integrated circuits current-starved cascoded inverter (CSCI) delta-sigma modulator Design. Technologies. Operation analysis. Testing Electric, optical and optoelectronic circuits Electronic circuits Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Exact sciences and technology Humidity humidity sensor Integrated circuits Inverters Modulation Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors Signal convertors Polyimide Moisture sensor Digital converter Sigma-delta modulation humidity sensor delta-sigma modulator Complementary MOS technology Humidity Electric power consumption Minimum energy Feedforward Transconductance capacitive-sensor interface current-starved cascoded inverter (CSCI) Inverter Modulator Operational amplifier Capacitive transducer Third order Measurement sensor Baseline Capacitance-to-digital converter Intelligent sensors Capacitance Low-power electronics Capacitor Radio frequency identification
ISSN:	0018-9200, 1558-173X
Online-Zugang:	Volltext
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