In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View

Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpene...

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Veröffentlicht in:	Microscopy and microanalysis Jg. 30; H. 6; S. 1109
Hauptverfasser:	Schwarz, Tim M, Woods, Eric, Singh, Mahander P, Chen, Xinren, Jung, Chanwon, Aota, Leonardo S, Jang, Kyuseon, Krämer, Mathias, Kim, Se-Ho, McCarroll, Ingrid, Gault, Baptiste
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	England 03.02.2025
Schlagworte:	coating field of view mass resolution yield atom probe tomography
ISSN:	1435-8115, 1435-8115
Online-Zugang:	Weitere Angaben
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