In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View
Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpene...
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| Vydané v: | Microscopy and microanalysis Ročník 30; číslo 6; s. 1109 |
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| Hlavní autori: | , , , , , , , , , , |
| Médium: | Journal Article |
| Jazyk: | English |
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England
03.02.2025
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| ISSN: | 1435-8115, 1435-8115 |
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| Abstract | Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses. |
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| AbstractList | Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses. Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses.Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses. |
| Author | Krämer, Mathias McCarroll, Ingrid Jung, Chanwon Gault, Baptiste Singh, Mahander P Woods, Eric Chen, Xinren Jang, Kyuseon Kim, Se-Ho Schwarz, Tim M Aota, Leonardo S |
| Author_xml | – sequence: 1 givenname: Tim M orcidid: 0000-0001-9348-4160 surname: Schwarz fullname: Schwarz, Tim M organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 2 givenname: Eric orcidid: 0000-0002-1169-893X surname: Woods fullname: Woods, Eric organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 3 givenname: Mahander P orcidid: 0000-0003-1784-7219 surname: Singh fullname: Singh, Mahander P organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 4 givenname: Xinren orcidid: 0000-0001-6528-8023 surname: Chen fullname: Chen, Xinren organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 5 givenname: Chanwon orcidid: 0000-0002-9782-0261 surname: Jung fullname: Jung, Chanwon organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 6 givenname: Leonardo S orcidid: 0000-0002-1520-2073 surname: Aota fullname: Aota, Leonardo S organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 7 givenname: Kyuseon orcidid: 0000-0003-1826-7443 surname: Jang fullname: Jang, Kyuseon organization: Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea – sequence: 8 givenname: Mathias orcidid: 0000-0002-1352-9064 surname: Krämer fullname: Krämer, Mathias organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 9 givenname: Se-Ho orcidid: 0000-0003-1227-8897 surname: Kim fullname: Kim, Se-Ho organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 10 givenname: Ingrid orcidid: 0000-0002-0584-4769 surname: McCarroll fullname: McCarroll, Ingrid organization: Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany – sequence: 11 givenname: Baptiste orcidid: 0000-0002-4934-0458 surname: Gault fullname: Gault, Baptiste organization: Department of Materials, Imperial College London, London SW7 2AZ, UK |
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