5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

Microacoustic resonators made on suspended continuous membranes of LiNbO3 were recently shown to have very strong coupling and low losses at ≥5 GHz, suitable for high-performance filter design. Employing these simple resonator structures, the authors have designed, fabricated, and measured a 4.7 GHz...

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Veröffentlicht in:	Electronics letters Jg. 55; H. 17; S. 942 - 944
Hauptverfasser:	Turner, P.J, Garcia, B, Yantchev, V, Dyer, G, Yandrapalli, S, Villanueva, L.G, Hammond, R.B, Plessky, V
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	The Institution of Engineering and Technology 22.08.2019
Schlagworte:	acoustic resonator filters bandwidth 600.0 MHz band‐pass filters finite element analysis finite element method software filter design frequency 4.7 GHz i‐line optical lithography ladder‐type filter LiNbO3 lithium compounds lithium niobate membrane microacoustic resonators microwave filters microwave resonators Microwave technology resonator engineering resonator structures semiconductor processing methods wideband microacoustic filter acoustic resonator filters microwave resonators microacoustic resonators lithium niobate membrane semiconductor processing methods frequency 4.7 GHz ladder-type filter resonator engineering LiNbO3 lithium compounds wideband microacoustic filter finite element analysis bandwidth 600.0 MHz i-line optical lithography band-pass filters finite element method software filter design microwave filters resonator structures
ISSN:	0013-5194, 1350-911X, 1350-911X
Online-Zugang:	Volltext
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