Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures

Conventional spectroscopic ellipsometry is a powerful tool in optical metrology. However, when it comes to the characterization of non-periodic nanostructures or structured fields that are much smaller than the illumination spot size, it is not well suited as it integrates the results over the whole...

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Bibliographic Details

Published in:	Frontiers in physics Vol. 9
Main Authors:	Käseberg, Tim, Grundmann, Jana, Siefke, Thomas, Klapetek, Petr, Valtr, Miroslav, Kroker, Stefanie, Bodermann, Bernd
Format:	Journal Article
Language:	English
Published:	Frontiers Media S.A 21.01.2022
Subjects:	ellipsometry imaging ellipsometry metrology mueller ellipsometry nanometrology nanostructures
ISSN:	2296-424X, 2296-424X
Online Access:	Get full text
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