Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints
Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating such tools, LLM plays a pivotal role. Additionally, wafer fabrication in VM faces strict wafer resid...
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| Veröffentlicht in: | IEEE transactions on automation science and engineering Jg. 22; S. 9544 - 9558 |
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| Abstract | Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating such tools, LLM plays a pivotal role. Additionally, wafer fabrication in VM faces strict wafer residency time constraints, making the coordination among the modules particularly challenging. This paper addresses the cyclic scheduling problem of single-arm cluster tools with EFEM and wafer residency time constraints. It focuses on the tool efficiency in module cooperation and schedulability. We explore cooperative strategies for the robot operating within VM to access loadlocks, elucidating the influence of EFEM and LLM on VM. Based on these strategies, we establish necessary and sufficient conditions for the existence of a feasible periodic schedule, providing a foundational basis for the systematic analysis. For schedulable scenarios, we derive an efficient algorithm to identify the feasible and optimal schedule in terms of tool cycle time. The performance and efficiency of the proposed algorithm are validated through experimental verification. Note to Practitioners-In wafer fabs, single-arm cluster tools with EFEM are widely adopted. Studies that neglect the impact of EFEM on scheduling cluster tools are often inapplicable to real-world scenarios. Wafer residency time constraints are essential for maintaining wafer quality. As VM and EFEM operate in different pressure environments, the cooperation via LLM makes it challenging to meet residency time constraints. To address this problem, this paper analyzes the impact of cooperative strategies on the tool performance, and the influence of EFEM and LLM on VM as well. Under these strategies, we examine the schedulability conditions, helping engineers understand how processing parameters affect scheduling feasibility. If a feasible schedule exists, an efficient algorithm is derived to find an optimal schedule. Experimental results show the efficiency of the proposed algorithm, making it suitable for embedding into cluster tool controllers for efficient implementation. For cases that are not schedulable, with the results obtained, this work can provide guidance of how to redesign the process such that feasibility can be ensured. |
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| AbstractList | Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating such tools, LLM plays a pivotal role. Additionally, wafer fabrication in VM faces strict wafer residency time constraints, making the coordination among the modules particularly challenging. This paper addresses the cyclic scheduling problem of single-arm cluster tools with EFEM and wafer residency time constraints. It focuses on the tool efficiency in module cooperation and schedulability. We explore cooperative strategies for the robot operating within VM to access loadlocks, elucidating the influence of EFEM and LLM on VM. Based on these strategies, we establish necessary and sufficient conditions for the existence of a feasible periodic schedule, providing a foundational basis for the systematic analysis. For schedulable scenarios, we derive an efficient algorithm to identify the feasible and optimal schedule in terms of tool cycle time. The performance and efficiency of the proposed algorithm are validated through experimental verification. Note to Practitioners-In wafer fabs, single-arm cluster tools with EFEM are widely adopted. Studies that neglect the impact of EFEM on scheduling cluster tools are often inapplicable to real-world scenarios. Wafer residency time constraints are essential for maintaining wafer quality. As VM and EFEM operate in different pressure environments, the cooperation via LLM makes it challenging to meet residency time constraints. To address this problem, this paper analyzes the impact of cooperative strategies on the tool performance, and the influence of EFEM and LLM on VM as well. Under these strategies, we examine the schedulability conditions, helping engineers understand how processing parameters affect scheduling feasibility. If a feasible schedule exists, an efficient algorithm is derived to find an optimal schedule. Experimental results show the efficiency of the proposed algorithm, making it suitable for embedding into cluster tool controllers for efficient implementation. For cases that are not schedulable, with the results obtained, this work can provide guidance of how to redesign the process such that feasibility can be ensured. |
| Author | Qiao, Yan Guo, WeiWen Huang, BaoYing Wu, NaiQi |
| Author_xml | – sequence: 1 givenname: BaoYing orcidid: 0000-0002-2742-6066 surname: Huang fullname: Huang, BaoYing email: baoyhuang@126.com organization: Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China – sequence: 2 givenname: NaiQi orcidid: 0000-0001-6782-458X surname: Wu fullname: Wu, NaiQi email: nqwu@must.edu.mo organization: Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China – sequence: 3 givenname: Yan orcidid: 0000-0001-5162-0224 surname: Qiao fullname: Qiao, Yan email: yqiao@must.edu.mo organization: Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China – sequence: 4 givenname: WeiWen orcidid: 0009-0008-9040-2279 surname: Guo fullname: Guo, WeiWen email: guoweiwen@hitachi-helc.com organization: Hitachi Building Technology (Guangzhou) Company Ltd., Guangzhou, China |
| BookMark | eNp9kE9LwzAUwINMcFM_gOAhX6AzaZqmPY6yqTARbGXHkqavLqNNZ5Ie9u1t2Q7iwUteHrzf-_NboJnpDSD0QMmSUpI-Fat8vQxJGC0ZJyLh0RWaU86TgImEzaZ_xAOecn6DFs4dyFiZpGSObK72UA-tNl84H58WgpXtcNYOzoPFRd-3Du-032Np8Pp70McOjMcb2xsfrE2N3_qRBpwP1QGUx77HO9mM5Ac4XYNRJ1zoDnDWG-et1Ma7O3TdyNbB_SXeos_Nushegu3782u22gaKscQHMqY0IiRKq5hIEQolkoaSKIzGTCYpjxVvqljUdS0aFoVKpbIRtAmTCgQwVbFbRM99le2ds9CUR6s7aU8lJeUkrZyklZO08iJtZMQfRmkvvR6vHZdv_yUfz6QGgF-TRCpiQdkPrMt9bA |
| CODEN | ITASC7 |
| CitedBy_id | crossref_primary_10_1109_TSMC_2025_3571733 crossref_primary_10_1109_TASE_2025_3562191 |
| Cites_doi | 10.1109/TSMC.2019.2899590 10.1109/WSC.2008.4736310 10.1109/tase.2024.3414843 10.1109/tcss.2024.3409893 10.1109/TASE.2020.3047924 10.1109/TSM.2008.2000425 10.1109/TSM.2020.2998734 10.1109/WSC.2012.6465316 10.1109/TASE.2016.2642997 10.1109/TSMC.2020.2964032 10.1016/j.ins.2024.120561 10.1016/j.jmsy.2020.02.004 10.1109/wsc.2005.1574508 10.1109/WSC.2006.322964 10.1109/TSM.2014.2375880 10.1109/WSC.2008.4736311 10.1109/TASE.2022.3203408 10.1109/CCDC.2015.7161774 10.1109/TSMC.2020.2978486 10.1109/CASE48305.2020.9216790 10.1080/0951192X.2020.1718767 10.1109/TSMC.2014.2327051 10.1080/00207543.2021.1887533 10.1109/icma.2012.6284366 10.1109/TSM.2015.2415523 10.1109/TSM.2023.3239198 10.1109/TSMC.2023.3317390 10.1109/TSMC.2014.2347928 10.1109/TSMC.2022.3222915 10.1109/TSMCA.2011.2170414 10.1109/66.641483 10.1007/s00170-014-5755-1 10.1016/j.compchemeng.2020.106982 10.1109/TSMC.2024.3409727 10.1109/TSMC.2021.3130161 10.1109/tase.2024.3399818 10.1109/tase.2023.3275703 10.1109/TSM.2003.810936 10.1109/tcss.2024.3417959 10.1109/TASE.2011.2160452 10.1109/TSMC.2023.3280207 10.1109/66.311340 10.1109/TASE.2021.3122576 |
| ContentType | Journal Article |
| DBID | 97E RIA RIE AAYXX CITATION |
| DOI | 10.1109/TASE.2024.3507854 |
| DatabaseName | IEEE All-Society Periodicals Package (ASPP) 2005–Present IEEE All-Society Periodicals Package (ASPP) 1998–Present IEEE Electronic Library (IEL) CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: RIE name: IEEE Xplore url: https://ieeexplore.ieee.org/ sourceTypes: Publisher |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1558-3783 |
| EndPage | 9558 |
| ExternalDocumentID | 10_1109_TASE_2024_3507854 10797671 |
| Genre | orig-research |
| GrantInformation_xml | – fundername: Science and Technology Development Fund (FDCT), Macau, SAR grantid: 0018/2021/A1; 0083/2021/A2; 0011/2023/RIA1 – fundername: Guangzhou Innovation and Entrepreneurship Leading Team Project Funding grantid: 202009020008 |
| GroupedDBID | -~X 0R~ 29I 4.4 5GY 5VS 6IK 97E AAJGR AARMG AASAJ AAWTH ABAZT ABQJQ ABVLG ACGFO ACGFS ACIWK AENEX AETIX AGQYO AGSQL AHBIQ AIBXA AKJIK AKQYR ALMA_UNASSIGNED_HOLDINGS ATWAV BEFXN BFFAM BGNUA BKEBE BPEOZ CS3 DU5 EBS EJD F5P HZ~ H~9 IFIPE IPLJI JAVBF LAI M43 O9- OCL PQQKQ RIA RIE RNS AAYXX CITATION |
| ID | FETCH-LOGICAL-c338t-a61140049b60a727c78f104240a7a8956c5fb67ddd7f342cc9af71f28be7e3cb3 |
| IEDL.DBID | RIE |
| ISICitedReferencesCount | 3 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=001377382700001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 1545-5955 |
| IngestDate | Sat Nov 29 08:05:49 EST 2025 Tue Nov 18 22:44:19 EST 2025 Wed Aug 27 02:05:00 EDT 2025 |
| IsPeerReviewed | false |
| IsScholarly | true |
| Language | English |
| License | https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html https://doi.org/10.15223/policy-029 https://doi.org/10.15223/policy-037 |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c338t-a61140049b60a727c78f104240a7a8956c5fb67ddd7f342cc9af71f28be7e3cb3 |
| ORCID | 0009-0008-9040-2279 0000-0001-5162-0224 0000-0001-6782-458X 0000-0002-2742-6066 |
| PageCount | 15 |
| ParticipantIDs | crossref_citationtrail_10_1109_TASE_2024_3507854 ieee_primary_10797671 crossref_primary_10_1109_TASE_2024_3507854 |
| PublicationCentury | 2000 |
| PublicationDate | 2025-01-01 |
| PublicationDateYYYYMMDD | 2025-01-01 |
| PublicationDate_xml | – month: 01 year: 2025 text: 2025-01-01 day: 01 |
| PublicationDecade | 2020 |
| PublicationTitle | IEEE transactions on automation science and engineering |
| PublicationTitleAbbrev | TASE |
| PublicationYear | 2025 |
| Publisher | IEEE |
| Publisher_xml | – name: IEEE |
| References | ref13 ref35 ref12 ref34 ref15 ref14 ref36 ref31 ref30 ref11 ref33 ref10 ref32 ref2 ref1 ref17 ref16 ref38 ref19 ref18 Zhang (ref39) 2024; 669 Yang (ref37) 2021; 34 ref24 ref23 ref26 ref25 ref42 ref41 ref22 ref44 ref21 ref43 Lee (ref20) ref28 ref27 ref29 ref8 ref7 ref9 ref4 ref3 ref6 ref5 ref40 |
| References_xml | – ident: ref28 doi: 10.1109/TSMC.2019.2899590 – start-page: 1 volume-title: Proc. 5th APIEMS Conf ident: ref20 article-title: Workload balancing and scheduling of a single-armed cluster tool – ident: ref19 doi: 10.1109/WSC.2008.4736310 – ident: ref44 doi: 10.1109/tase.2024.3414843 – ident: ref8 doi: 10.1109/tcss.2024.3409893 – ident: ref12 doi: 10.1109/TASE.2020.3047924 – ident: ref33 doi: 10.1109/TSM.2008.2000425 – ident: ref36 doi: 10.1109/TSM.2020.2998734 – ident: ref11 doi: 10.1109/WSC.2012.6465316 – ident: ref24 doi: 10.1109/TASE.2016.2642997 – ident: ref29 doi: 10.1109/TSMC.2020.2964032 – volume: 669 year: 2024 ident: ref39 article-title: Efficient approach to cyclic scheduling of high throughput screening systems for bioengineering publication-title: Inf. Sci. doi: 10.1016/j.ins.2024.120561 – ident: ref3 doi: 10.1016/j.jmsy.2020.02.004 – ident: ref18 doi: 10.1109/wsc.2005.1574508 – ident: ref30 doi: 10.1109/WSC.2006.322964 – ident: ref40 doi: 10.1109/TSM.2014.2375880 – ident: ref1 doi: 10.1109/WSC.2008.4736311 – ident: ref23 doi: 10.1109/TASE.2022.3203408 – ident: ref2 doi: 10.1109/CCDC.2015.7161774 – ident: ref17 doi: 10.1109/TSMC.2020.2978486 – ident: ref4 doi: 10.1109/CASE48305.2020.9216790 – volume: 34 start-page: 734 issue: 7 year: 2021 ident: ref37 article-title: Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation publication-title: Int. J. Comput. Integr. Manuf. doi: 10.1080/0951192X.2020.1718767 – ident: ref38 doi: 10.1109/TSMC.2014.2327051 – ident: ref22 doi: 10.1080/00207543.2021.1887533 – ident: ref16 doi: 10.1109/icma.2012.6284366 – ident: ref15 doi: 10.1109/TSM.2015.2415523 – ident: ref32 doi: 10.1109/TSM.2023.3239198 – ident: ref13 doi: 10.1109/TSMC.2023.3317390 – ident: ref27 doi: 10.1109/TSMC.2014.2347928 – ident: ref35 doi: 10.1109/TSMC.2022.3222915 – ident: ref43 doi: 10.1109/TSMCA.2011.2170414 – ident: ref31 doi: 10.1109/66.641483 – ident: ref10 doi: 10.1007/s00170-014-5755-1 – ident: ref5 doi: 10.1016/j.compchemeng.2020.106982 – ident: ref6 doi: 10.1109/TSMC.2024.3409727 – ident: ref7 doi: 10.1109/TSMC.2021.3130161 – ident: ref14 doi: 10.1109/tase.2024.3399818 – ident: ref41 doi: 10.1109/tase.2023.3275703 – ident: ref21 doi: 10.1109/TSM.2003.810936 – ident: ref9 doi: 10.1109/tcss.2024.3417959 – ident: ref34 doi: 10.1109/TASE.2011.2160452 – ident: ref42 doi: 10.1109/TSMC.2023.3280207 – ident: ref25 doi: 10.1109/66.311340 – ident: ref26 doi: 10.1109/TASE.2021.3122576 |
| SSID | ssj0024890 |
| Score | 2.4137728 |
| Snippet | Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an... |
| SourceID | crossref ieee |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 9544 |
| SubjectTerms | cluster tools Clustering algorithms Job shop scheduling Loading Optimal scheduling Petri nets Robot kinematics Schedules scheduling Semiconductor manufacturing Time factors Transportation |
| Title | Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints |
| URI | https://ieeexplore.ieee.org/document/10797671 |
| Volume | 22 |
| WOSCitedRecordID | wos001377382700001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVIEE databaseName: IEEE Xplore customDbUrl: eissn: 1558-3783 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0024890 issn: 1545-5955 databaseCode: RIE dateStart: 20040101 isFulltext: true titleUrlDefault: https://ieeexplore.ieee.org/ providerName: IEEE |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LS8NAEF60eNCDb7G-2IMnITVtkm72WEqKBy1iK-0tZF9aCIk2ieC_d2YTtR4UvIQk7MKSL7s738zON4RcwjYAKwCwE218BQQF5hxqsDjAb12PS9_3jNWZvWXjcTif8_smWd3mwmit7eEz3cFbG8tXuazQVQYznMHuiRnj64yxOlnrW1gvtA4VNAmcgAdBE8Lsuvx6OphEQAV7fscD8ycM_B-b0EpVFbupjHb-OZxdst1Yj3RQw71H1nS2T7ZWNAUPyHICMCg8X_5EJ3BJtQNg0mFaoSQCneZ5WtDZonymSUaj12phDwzREQoZOFGm6F0OvTWFFQVdNLTM6Swx0PNBF7YA6TvFtBGKlT5tfYmyOCSPo2g6vHGawgqOBEZaOkkfWBByA9F3EzBgJAtNF2Og8JSEwJhkYESfKaWY8fyelDwxrGt6odBMe1J4R6SV5Zk-JlRoT0sBhpPC-J3ggqMAmgp44jMZStUm7ueXjmWjOo6DS2PLPlweIzgxghM34LTJ1VeXl1py46_GhwjMSsMak5Nf3p-SzR5W8LVOlDPSKpeVPicb8q1cFMsL-0d9AIcCyGM |
| linkProvider | IEEE |
| linkToHtml | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LS8NAEF6kCurBZ8X63IMnITVNNk32WEpLxbaIrbS3kH1ECyHRJhX8985so9aDgpeQhF1Y8mV355vZ-YaQK9gGYAUAdqJjpoCgwJxDDRYL-K3tcsmYGxud2b4_HAbTKb8vk9VNLozW2hw-03W8NbF8lckFuspghvuwe2LG-LrHmNNYpmt9S-sFxqWCRoHlcc8rg5gNm9-MW6MOkEGH1V0wgAKP_diGVuqqmG2lu_vPAe2RndJ-pK0l4PtkTacHZHtFVfCQzEcAhMIT5k90BJdEWwAnbScLFEWg4yxLcjqZFc80SmnndTEzR4ZoF6UMrE6q6CCD3prCmoJOGlpkdBLF0PNB56YE6TvFxBGKtT5NhYkir5LHbmfc7lllaQVLAictrKgJPAjZgWjaEZgw0g_iBkZB4SkKgDNJLxZNXynlxy5zpORR7DdiJxDa164U7hGppFmqjwkV2tVSgOmkMIInuOAogaY8HjFfBlLViP35pUNZ6o7j4JLQ8A-bhwhOiOCEJTg1cv3V5WUpuvFX4yoCs9JwicnJL-8vyWZvPOiH_dvh3SnZcrCer3GpnJFKMV_oc7Ih34pZPr8wf9cHHRHLqg |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Scheduling+Single-Arm+Cluster+Tools+With+an+Equipment+Front-End+Module+Subject+to+Wafer+Residency+Time+Constraints&rft.jtitle=IEEE+transactions+on+automation+science+and+engineering&rft.au=Huang%2C+BaoYing&rft.au=Wu%2C+NaiQi&rft.au=Qiao%2C+Yan&rft.au=Guo%2C+WeiWen&rft.date=2025-01-01&rft.issn=1545-5955&rft.eissn=1558-3783&rft.volume=22&rft.spage=9544&rft.epage=9558&rft_id=info:doi/10.1109%2FTASE.2024.3507854&rft.externalDBID=n%2Fa&rft.externalDocID=10_1109_TASE_2024_3507854 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1545-5955&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1545-5955&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1545-5955&client=summon |