Huang, B., Wu, N., Qiao, Y., & Guo, W. (2025). Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints. IEEE transactions on automation science and engineering, 22, 9544-9558. https://doi.org/10.1109/TASE.2024.3507854
Citace podle Chicago (17th ed.)Huang, BaoYing, NaiQi Wu, Yan Qiao, a WeiWen Guo. "Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints." IEEE Transactions on Automation Science and Engineering 22 (2025): 9544-9558. https://doi.org/10.1109/TASE.2024.3507854.
Citace podle MLA (9th ed.)Huang, BaoYing, et al. "Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints." IEEE Transactions on Automation Science and Engineering, vol. 22, 2025, pp. 9544-9558, https://doi.org/10.1109/TASE.2024.3507854.