APA (7th ed.) Citation

Wadley, H., Zhou, X., Johnson, R., & Neurock, M. (2001). Mechanisms, models and methods of vapor deposition. Progress in materials science, 46(3), 329-377. https://doi.org/10.1016/S0079-6425(00)00009-8

Chicago Style (17th ed.) Citation

Wadley, H.N.G, X. Zhou, R.A Johnson, and M. Neurock. "Mechanisms, Models and Methods of Vapor Deposition." Progress in Materials Science 46, no. 3 (2001): 329-377. https://doi.org/10.1016/S0079-6425(00)00009-8.

MLA (9th ed.) Citation

Wadley, H.N.G, et al. "Mechanisms, Models and Methods of Vapor Deposition." Progress in Materials Science, vol. 46, no. 3, 2001, pp. 329-377, https://doi.org/10.1016/S0079-6425(00)00009-8.