Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches

Effects of uncertainties in gas damping models, geometry and mechanical properties on the dynamics of micro-electro-mechanical systems (MEMS) capacitive switch are studied. A sample of typical capacitive switches has been fabricated and characterized at Purdue University. High-fidelity simulations o...

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Bibliographic Details
Published in:	Reliability engineering & system safety Vol. 96; no. 9; pp. 1171 - 1183
Main Authors:	Alexeenko, Alina, Chigullapalli, Sruti, Zeng, Juan, Guo, Xiaohui, Kovacs, Andrew, Peroulis, Dimitrios
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01.09.2011
Subjects:	Aleatory uncertainty Damping Dynamics Electric potential Epistemic uncertainty Impact velocity Mathematical models Microsystems Quantification of margins and uncertainties RF MEMS Squeeze-film damping Switches Uncertainty Uncertainty analysis Voltage Microsystems Epistemic uncertainty RF MEMS Quantification of margins and uncertainties Squeeze-film damping Uncertainty analysis Aleatory uncertainty
ISSN:	0951-8320, 1879-0836
Online Access:	Get full text
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