APA (7th ed.) Citation

Alexeenko, A., Chigullapalli, S., Zeng, J., Guo, X., Kovacs, A., & Peroulis, D. (2011). Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches. Reliability engineering & system safety, 96(9), 1171-1183. https://doi.org/10.1016/j.ress.2011.01.002

Chicago Style (17th ed.) Citation

Alexeenko, Alina, Sruti Chigullapalli, Juan Zeng, Xiaohui Guo, Andrew Kovacs, and Dimitrios Peroulis. "Uncertainty in Microscale Gas Damping: Implications on Dynamics of Capacitive MEMS Switches." Reliability Engineering & System Safety 96, no. 9 (2011): 1171-1183. https://doi.org/10.1016/j.ress.2011.01.002.

MLA (9th ed.) Citation

Alexeenko, Alina, et al. "Uncertainty in Microscale Gas Damping: Implications on Dynamics of Capacitive MEMS Switches." Reliability Engineering & System Safety, vol. 96, no. 9, 2011, pp. 1171-1183, https://doi.org/10.1016/j.ress.2011.01.002.