Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage

Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch fashion. The aim of this paper is to develop an approach to estimate the parameters of rational feedforward controllers that provide high performanc...

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Bibliographic Details

Published in:	Asian journal of control Vol. 20; no. 3; pp. 975 - 992
Main Authors:	Boeren, Frank, Blanken, Lennart, Bruijnen, Dennis, Oomen, Tom
Format:	Journal Article
Language:	English
Published:	Hoboken Wiley Subscription Services, Inc 01.05.2018
Subjects:	Actuation Computer simulation Control systems Control theory Controllers Economic models Feedforward control learning control mechatronics Parameter estimation Performance enhancement
ISSN:	1561-8625, 1934-6093
Online Access:	Get full text
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