Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage
Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch fashion. The aim of this paper is to develop an approach to estimate the parameters of rational feedforward controllers that provide high performanc...
Saved in:
| Published in: | Asian journal of control Vol. 20; no. 3; pp. 975 - 992 |
|---|---|
| Main Authors: | , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Hoboken
Wiley Subscription Services, Inc
01.05.2018
|
| Subjects: | |
| ISSN: | 1561-8625, 1934-6093 |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Abstract | Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch fashion. The aim of this paper is to develop an approach to estimate the parameters of rational feedforward controllers that provide high performance and extrapolation capabilities towards varying tasks. An instrumental variable‐based algorithm is developed that leads to unbiased parameter estimates and optimal accuracy in terms of variance. Furthermore, a noncausal implementation of rational feedforward controllers is proposed, aiming to improve performance by means of pre‐actuation. Simulation and experimental results are presented to confirm that optimal accuracy is obtained with the proposed approach, and show the advantages of pre‐actuation in terms of performance. |
|---|---|
| AbstractList | Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch fashion. The aim of this paper is to develop an approach to estimate the parameters of rational feedforward controllers that provide high performance and extrapolation capabilities towards varying tasks. An instrumental variable‐based algorithm is developed that leads to unbiased parameter estimates and optimal accuracy in terms of variance. Furthermore, a noncausal implementation of rational feedforward controllers is proposed, aiming to improve performance by means of pre‐actuation. Simulation and experimental results are presented to confirm that optimal accuracy is obtained with the proposed approach, and show the advantages of pre‐actuation in terms of performance. |
| Author | Boeren, Frank Blanken, Lennart Oomen, Tom Bruijnen, Dennis |
| Author_xml | – sequence: 1 givenname: Frank surname: Boeren fullname: Boeren, Frank email: frankboeren@gmail.com organization: Eindhoven University of Technology – sequence: 2 givenname: Lennart surname: Blanken fullname: Blanken, Lennart organization: Eindhoven University of Technology – sequence: 3 givenname: Dennis surname: Bruijnen fullname: Bruijnen, Dennis organization: Philips Innovation Services – sequence: 4 givenname: Tom surname: Oomen fullname: Oomen, Tom organization: Eindhoven University of Technology |
| BookMark | eNp9kM9LwzAcxYNMcJse_A8Cnjx0y4-mbbyNsulkIDh1x5KliWZ0TU0yx_57282ToKfv48vnPXhvAHq1rRUA1xiNMEJkLPxGjjDj7Az0MadxlCBOe61mCY6yhLALMPB-g1CCacb6oHlqgtmKCk59d4OxNbQaPh9V-54pVWrr9sKVMLd1cLaCX0bAee2D221VHVroTTgj1pXyd3BlwgecNE1l5CksWCjgSmjl4DKId3UJzrWovLr6uUPwOpu-5A_R4ul-nk8WkaSUsCjWKYvVWq-zmBIsJE5LzkmJWZogpUiGFc9kmpSoxJzFhCZSE8IlZghzrTNBh-DmlNs4-7lTPhQbu3NtJV8QFKc0ZhTjlro9UdJZ753SRePaGdyhwKjoBi26QYtu0JYd_2KlCceSwQlT_efYm0od_o4uJsvH_Oj4BleXig4 |
| CitedBy_id | crossref_primary_10_1049_cth2_12093 crossref_primary_10_1155_2020_9391526 crossref_primary_10_1002_asjc_2275 crossref_primary_10_1016_j_ifacol_2023_10_662 crossref_primary_10_1002_asjc_3377 crossref_primary_10_1109_TMECH_2019_2929565 crossref_primary_10_1016_j_ejcon_2025_101238 crossref_primary_10_1109_TIE_2023_3314893 crossref_primary_10_1016_j_mechatronics_2020_102424 crossref_primary_10_1016_j_ifacol_2022_07_308 crossref_primary_10_1109_TCST_2024_3385632 crossref_primary_10_1016_j_ifacsc_2024_100241 crossref_primary_10_1109_TIE_2018_2878114 crossref_primary_10_1109_TIE_2025_3552259 crossref_primary_10_1016_j_automatica_2024_112013 crossref_primary_10_1109_LCSYS_2025_3578480 crossref_primary_10_1109_TNNLS_2020_3042975 |
| Cites_doi | 10.1016/S0005-1098(01)00133-9 10.1016/j.precisioneng.2003.08.002 10.1016/j.automatica.2014.10.126 10.1109/ACC.2014.6858833 10.1109/TCST.2013.2245668 10.1007/978-1-4471-0101-7 10.1016/j.automatica.2013.02.054 10.1007/1-84628-178-4 10.1016/j.automatica.2004.09.016 10.1080/00207179.2016.1219921 10.1109/MCS.2011.941882 10.1016/j.automatica.2016.01.026 10.1002/047134608X.W1046 10.1007/978-94-007-2300-9 10.1109/TAC.1981.1102679 10.1115/DSCC2014-5960 10.1109/TCST.2012.2187787 10.1109/TMECH.2016.2625309 10.1080/00207170903334805 10.1109/TMECH.2008.2007302 10.1016/S1367-5788(98)00016-9 10.1109/MCS.2006.1636313 10.1109/TCST.2004.824797 10.1016/j.mechatronics.2013.10.003 10.1109/TCST.2005.854334 10.1016/j.conengprac.2014.12.015 10.1109/CDC.2015.7403172 10.1109/TCST.2014.2371830 10.1109/TCST.2011.2174153 10.1109/TIE.2016.2562606 10.1109/TMECH.2016.2577139 10.1016/j.automatica.2009.10.008 10.1016/j.conengprac.2004.02.010 10.1016/S0005-1098(99)00022-9 10.1109/9.489285 10.1002/asjc.943 10.1109/TCST.2013.2278534 10.1002/asjc.93 10.1109/TCST.2014.2327578 |
| ContentType | Journal Article |
| Copyright | 2017 Chinese Automatic Control Society and John Wiley & Sons Australia, Ltd 2018 Chinese Automatic Control Society and John Wiley & Sons Australia, Ltd |
| Copyright_xml | – notice: 2017 Chinese Automatic Control Society and John Wiley & Sons Australia, Ltd – notice: 2018 Chinese Automatic Control Society and John Wiley & Sons Australia, Ltd |
| DBID | AAYXX CITATION JQ2 |
| DOI | 10.1002/asjc.1595 |
| DatabaseName | CrossRef ProQuest Computer Science Collection |
| DatabaseTitle | CrossRef ProQuest Computer Science Collection |
| DatabaseTitleList | ProQuest Computer Science Collection CrossRef |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1934-6093 |
| EndPage | 992 |
| ExternalDocumentID | 10_1002_asjc_1595 ASJC1595 |
| Genre | article |
| GroupedDBID | .4S .DC 05W 0R~ 1L6 1OC 23N 31~ 33P 3SF 4.4 52U 5DZ 5GY 8-0 8-1 A00 AAESR AAEVG AAHHS AAHQN AAMNL AANHP AANLZ AAONW AASGY AAXRX AAYCA AAZKR ABCUV ABJNI ACAHQ ACBWZ ACCFJ ACCZN ACGFS ACIWK ACPOU ACRPL ACXBN ACXQS ACYXJ ADBBV ADEOM ADIZJ ADKYN ADMGS ADNMO ADOZA ADXAS ADZMN ADZOD AEEZP AEIGN AEIMD AENEX AEQDE AEUQT AEUYR AFBPY AFFPM AFGKR AFPWT AFWVQ AHBTC AITYG AIURR AIWBW AJBDE AJXKR ALMA_UNASSIGNED_HOLDINGS ALUQN ALVPJ AMBMR AMYDB ARCSS ASPBG ATUGU AUFTA AVWKF AZFZN AZVAB BDRZF BFHJK BHBCM BMNLL BMXJE BNHUX BOGZA BRXPI CS3 DCZOG DRFUL DRSTM EBS EJD F5P FEDTE G-S GODZA HGLYW HVGLF HZ~ I-F J9A LATKE LEEKS LH4 LITHE LOXES LUTES LW6 LYRES MEWTI MRFUL MRSTM MSFUL MSSTM MXFUL MXSTM MY. MY~ O9- OIG P2W P4E PQQKQ ROL RWI SUPJJ TUS WBKPD WIH WIK WOHZO WXSBR WYJ XV2 ZZTAW ~S- AAMMB AAYXX ADMLS AEFGJ AEYWJ AGHNM AGQPQ AGXDD AGYGG AIDQK AIDYY CITATION JQ2 |
| ID | FETCH-LOGICAL-c3325-4f754ebfb84321ac17d992d15760ee281e98c76d0d1954236cf229c15019ff8a3 |
| IEDL.DBID | DRFUL |
| ISICitedReferencesCount | 23 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000434052200002&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 1561-8625 |
| IngestDate | Fri Jul 25 12:18:36 EDT 2025 Sat Nov 29 04:00:01 EST 2025 Tue Nov 18 21:38:53 EST 2025 Wed Jan 22 16:20:29 EST 2025 |
| IsDoiOpenAccess | false |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 3 |
| Language | English |
| License | http://onlinelibrary.wiley.com/termsAndConditions#vor |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c3325-4f754ebfb84321ac17d992d15760ee281e98c76d0d1954236cf229c15019ff8a3 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| OpenAccessLink | https://research.tue.nl/en/publications/f4aebec6-af15-490f-8c56-adf5bde52d63 |
| PQID | 2047345311 |
| PQPubID | 866359 |
| PageCount | 18 |
| ParticipantIDs | proquest_journals_2047345311 crossref_primary_10_1002_asjc_1595 crossref_citationtrail_10_1002_asjc_1595 wiley_primary_10_1002_asjc_1595_ASJC1595 |
| PublicationCentury | 2000 |
| PublicationDate | May 2018 2018-05-00 20180501 |
| PublicationDateYYYYMMDD | 2018-05-01 |
| PublicationDate_xml | – month: 05 year: 2018 text: May 2018 |
| PublicationDecade | 2010 |
| PublicationPlace | Hoboken |
| PublicationPlace_xml | – name: Hoboken |
| PublicationTitle | Asian journal of control |
| PublicationYear | 2018 |
| Publisher | Wiley Subscription Services, Inc |
| Publisher_xml | – name: Wiley Subscription Services, Inc |
| References | 2015; 37 2017; 64 2015; 17 2013; 49 2012 2013; 21 2004; 28 2017; 22 2015; 52 2011; 31 2005; 41 2014; 24 1981; 26 2005 1970 2002 2014; 22 1998; 22 2010; 83 1999 2009; 11 2015; 23 2009; 14 2017; 90 2010; 46 2000 2004; 12 2006; 26 1999; 35 2016; 21 1996; 41 2001; 37 2015 2014 2008; 130 2012; 20 2005; 13 1989 2016; 67 e_1_2_9_30_1 e_1_2_9_31_1 e_1_2_9_11_1 e_1_2_9_10_1 e_1_2_9_35_1 e_1_2_9_13_1 e_1_2_9_32_1 e_1_2_9_12_1 e_1_2_9_33_1 Skogestad S. (e_1_2_9_40_1) 2005 e_1_2_9_15_1 e_1_2_9_38_1 e_1_2_9_14_1 e_1_2_9_39_1 e_1_2_9_17_1 e_1_2_9_36_1 e_1_2_9_16_1 e_1_2_9_37_1 e_1_2_9_19_1 e_1_2_9_18_1 e_1_2_9_41_1 e_1_2_9_42_1 e_1_2_9_20_1 e_1_2_9_22_1 e_1_2_9_45_1 e_1_2_9_21_1 e_1_2_9_24_1 e_1_2_9_43_1 e_1_2_9_23_1 e_1_2_9_44_1 e_1_2_9_8_1 Söderström T. (e_1_2_9_34_1) 1989 e_1_2_9_7_1 e_1_2_9_6_1 e_1_2_9_5_1 e_1_2_9_3_1 e_1_2_9_2_1 Ȧström K. (e_1_2_9_27_1) 1970 Meulen S. (e_1_2_9_4_1) 2008; 130 e_1_2_9_9_1 e_1_2_9_26_1 e_1_2_9_25_1 e_1_2_9_28_1 e_1_2_9_29_1 |
| References_xml | – volume: 22 start-page: 173 year: 1998 end-page: 186 article-title: Closed‐loop issues in system identification publication-title: Ann. Rev. Control – volume: 64 start-page: 4139 issue: 5 year: 2017 end-page: 4149 article-title: An integrated model‐data‐based zero‐phase error tracking feedforward control strategy with application to an ultraprecision wafer stage publication-title: IEEE Trans. Ind. Electron. – start-page: 481 year: 2000 end-page: 486 – volume: 37 start-page: 1803 issue: 11 year: 2001 end-page: 1809 article-title: An iterative learning control algorithm within prescribed input‐output subspace publication-title: Automatica – volume: 41 start-page: 608 issue: 4 year: 1996 end-page: 611 article-title: Noncausal inverses for linear systems publication-title: IEEE Trans. Autom. Control – start-page: 6058 year: 2015 end-page: 6063 – volume: 23 start-page: 722 issue: 2 year: 2015 end-page: 729 article-title: Rational basis functions in iterative learning control ‐ with experimental verification on a motion system publication-title: IEEE Trans. Control Syst. Technol. – volume: 13 start-page: 145 issue: 2 year: 2005 end-page: 157 article-title: Trajectory planning and feedforward design for electromechanical motion systems publication-title: Control Eng. Practice – year: 2005 – volume: 41 start-page: 241 year: 2005 end-page: 249 article-title: Instrumental variable methods for closed‐loop system identification publication-title: Automatica – volume: 67 start-page: 295 year: 2016 end-page: 302 article-title: Optimality and flexibility in iterative learning control for varying tasks publication-title: Automatica – volume: 37 start-page: 11 year: 2015 end-page: 19 article-title: Iterative motion feedforward tuning: A data‐driven approach based on instrumental variable identification publication-title: Control Eng. Practice – year: 1989 – volume: 31 start-page: 28 year: 2011 end-page: 47 article-title: Position control in lithographic equipment: An enabler for current‐day chip manufacturing publication-title: IEEE Control Syst. Mag. – volume: 90 start-page: 746 issue: 4 year: 2017 end-page: 764 article-title: Enhancing feedforward controller tuning via instrumental variables: With application to nanopositioning publication-title: Int. J. Control – volume: 14 start-page: 388 issue: 3 year: 2009 end-page: 393 article-title: Projection‐based iterative learning control for wafer scanner systems publication-title: IEEE/ASME Trans. Mechatron. – volume: 52 start-page: 35 year: 2015 end-page: 46 article-title: Refined instrumental variable estimation: maximum likelihood optimization of a unified Box‐Jenkins model publication-title: Automatica – volume: 22 start-page: 1581 issue: 4 year: 2014 end-page: 1588 article-title: Bumpless transfer filter for exogenous feedforward signals publication-title: IEEE Trans. Control Syst. Technol. – volume: 26 start-page: 712 issue: 3 year: 1981 end-page: 717 article-title: The Steiglitz‐McBride identification algorithm revisited ‐ convergence analysis and accuracy aspects publication-title: IEEE Trans. Autom. Control – volume: 20 start-page: 323 issue: 2 year: 2012 end-page: 334 article-title: Time‐optimal control with pre/post actuation for dual‐stage systems publication-title: IEEE Trans. Control Syst. Technol. – volume: 49 start-page: 1874 issue: 6 year: 2013 end-page: 1882 article-title: Optimal input design for direct data‐driven tuning of model‐reference controllers publication-title: Automatica – volume: 24 start-page: 605 issue: 6 year: 2014 end-page: 618 article-title: Measuring and predicting resolution in nanopositioning systems publication-title: IFAC Mechatronics – year: 2014 – volume: 11 start-page: 175 issue: 2 year: 2009 end-page: 181 article-title: A comparison of control architectures for atomic force microscopes publication-title: Asian J. Control – year: 2012 – volume: 130 issue: 5 year: 2008 article-title: Fixed structure feedforward controller design exploiting iterative trials: Application to a wafer stage and a desktop printer publication-title: J. Dyn. Syst., Meas., Control‐Trans. ASME – volume: 35 start-page: 1215 issue: 7 year: 1999 end-page: 1241 article-title: Closed‐loop identification revisited publication-title: Automatica – volume: 13 start-page: 921 issue: 6 year: 2005 end-page: 931 article-title: Iterative control of dynamics‐coupling‐caused errors in piezoscanners during high‐speed AFM operation publication-title: IEEE Trans. Control Syst. Technol. – volume: 46 start-page: 122 issue: 1 year: 2010 end-page: 126 article-title: On the equivalence between stable inversion for nonminimum‐phase systems and reciprocal transfer functions defined by the two‐sided Laplace transform publication-title: Automatica – year: 2002 – volume: 21 start-page: 2716 issue: 6 year: 2016 end-page: 2727 article-title: Frequency‐domain ILC approach for repeating and varying tasks: With application to semiconductor bonding equipment publication-title: IEEE/ASME Trans. Mechatron. – volume: 21 start-page: 604 issue: 3 year: 2013 end-page: 616 article-title: Iterative learning control with mixed constraints for point‐to‐point tracking publication-title: IEEE Trans. Control Syst. Technol. – volume: 28 start-page: 171 issue: 2 year: 2004 end-page: 180 article-title: Electro‐dynamic planar motor publication-title: Precis. Eng. – volume: 26 start-page: 96 issue: 3 year: 2006 end-page: 114 article-title: A survey of iterative learning control: a learning‐based method for high‐performance tracking control publication-title: IEEE Control Syst. Mag. – volume: 22 start-page: 826 issue: 2 year: 2017 end-page: 837 article-title: Batch‐to‐batch rational feedforward control: from iterative learning to identification approaches, with application to a wafer stage publication-title: IEEE/ASME Trans. Mechatron. – year: 1970 – volume: 22 start-page: 102 issue: 1 year: 2014 end-page: 118 article-title: Connecting system identification and robust control for next‐generation motion control of a wafer stage publication-title: IEEE Trans. Control Syst. Technol. – start-page: 2178 year: 2014 end-page: 2183 – volume: 23 start-page: 1602 issue: 4 year: 2015 end-page: 1610 article-title: Inferential motion control: Identification and robust control framework for positioning an unmeasurable point of interest publication-title: IEEE Trans. Control Syst. Technol. – volume: 17 start-page: 952 issue: 3 year: 2015 end-page: 962 article-title: Adaptive terminal ILC for iteration‐varying target points publication-title: Asian J. Control – volume: 83 start-page: 661 issue: 4 year: 2010 end-page: 675 article-title: Using basis functions in iterative learning control: analysis and design theory publication-title: Int. J. Control – volume: 12 start-page: 375 issue: 3 year: 2004 end-page: 386 article-title: Preview‐based optimal inversion for output tracking: Application to scanning tunneling microscopy publication-title: IEEE Trans. Control Syst. Technol. – year: 1999 – ident: e_1_2_9_10_1 doi: 10.1016/S0005-1098(01)00133-9 – ident: e_1_2_9_39_1 doi: 10.1016/j.precisioneng.2003.08.002 – volume: 130 issue: 5 year: 2008 ident: e_1_2_9_4_1 article-title: Fixed structure feedforward controller design exploiting iterative trials: Application to a wafer stage and a desktop printer publication-title: J. Dyn. Syst., Meas., Control‐Trans. ASME – ident: e_1_2_9_32_1 doi: 10.1016/j.automatica.2014.10.126 – ident: e_1_2_9_18_1 doi: 10.1109/ACC.2014.6858833 – ident: e_1_2_9_41_1 doi: 10.1109/TCST.2013.2245668 – ident: e_1_2_9_45_1 doi: 10.1007/978-1-4471-0101-7 – volume-title: Multivariable Feedback Control: Analysis and Design year: 2005 ident: e_1_2_9_40_1 – ident: e_1_2_9_42_1 doi: 10.1016/j.automatica.2013.02.054 – ident: e_1_2_9_19_1 doi: 10.1007/1-84628-178-4 – ident: e_1_2_9_33_1 doi: 10.1016/j.automatica.2004.09.016 – ident: e_1_2_9_31_1 doi: 10.1080/00207179.2016.1219921 – ident: e_1_2_9_38_1 doi: 10.1109/MCS.2011.941882 – ident: e_1_2_9_44_1 doi: 10.1016/j.automatica.2016.01.026 – ident: e_1_2_9_24_1 doi: 10.1002/047134608X.W1046 – volume-title: System Identification year: 1989 ident: e_1_2_9_34_1 – ident: e_1_2_9_13_1 doi: 10.1007/978-94-007-2300-9 – ident: e_1_2_9_35_1 doi: 10.1109/TAC.1981.1102679 – ident: e_1_2_9_30_1 doi: 10.1115/DSCC2014-5960 – ident: e_1_2_9_6_1 doi: 10.1109/TCST.2012.2187787 – volume-title: Introduction to Stochastic control theory, ser. Mathematics in science and engineering year: 1970 ident: e_1_2_9_27_1 – ident: e_1_2_9_22_1 doi: 10.1109/TMECH.2016.2625309 – ident: e_1_2_9_11_1 doi: 10.1080/00207170903334805 – ident: e_1_2_9_8_1 doi: 10.1109/TMECH.2008.2007302 – ident: e_1_2_9_15_1 doi: 10.1016/S1367-5788(98)00016-9 – ident: e_1_2_9_5_1 doi: 10.1109/MCS.2006.1636313 – ident: e_1_2_9_20_1 doi: 10.1109/TCST.2004.824797 – ident: e_1_2_9_25_1 doi: 10.1016/j.mechatronics.2013.10.003 – ident: e_1_2_9_2_1 doi: 10.1109/TCST.2005.854334 – ident: e_1_2_9_14_1 doi: 10.1016/j.conengprac.2014.12.015 – ident: e_1_2_9_23_1 doi: 10.1109/CDC.2015.7403172 – ident: e_1_2_9_43_1 doi: 10.1109/TCST.2014.2371830 – ident: e_1_2_9_37_1 doi: 10.1109/TCST.2011.2174153 – ident: e_1_2_9_17_1 doi: 10.1109/TIE.2016.2562606 – ident: e_1_2_9_29_1 doi: 10.1109/TMECH.2016.2577139 – ident: e_1_2_9_36_1 doi: 10.1016/j.automatica.2009.10.008 – ident: e_1_2_9_28_1 doi: 10.1016/j.conengprac.2004.02.010 – ident: e_1_2_9_26_1 – ident: e_1_2_9_16_1 doi: 10.1016/S0005-1098(99)00022-9 – ident: e_1_2_9_21_1 doi: 10.1109/9.489285 – ident: e_1_2_9_9_1 doi: 10.1002/asjc.943 – ident: e_1_2_9_7_1 doi: 10.1109/TCST.2013.2278534 – ident: e_1_2_9_3_1 doi: 10.1002/asjc.93 – ident: e_1_2_9_12_1 doi: 10.1109/TCST.2014.2327578 |
| SSID | ssj0061385 |
| Score | 2.2764108 |
| Snippet | Iterative control enables a significant control performance enhancement by learning feedforward command signals from previous tasks in a batch‐to‐batch... |
| SourceID | proquest crossref wiley |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 975 |
| SubjectTerms | Actuation Computer simulation Control systems Control theory Controllers Economic models Feedforward control learning control mechatronics Parameter estimation Performance enhancement |
| Title | Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage |
| URI | https://onlinelibrary.wiley.com/doi/abs/10.1002%2Fasjc.1595 https://www.proquest.com/docview/2047345311 |
| Volume | 20 |
| WOSCitedRecordID | wos000434052200002&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVWIB databaseName: Wiley Online Library Full Collection 2020 customDbUrl: eissn: 1934-6093 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0061385 issn: 1561-8625 databaseCode: DRFUL dateStart: 19990101 isFulltext: true titleUrlDefault: https://onlinelibrary.wiley.com providerName: Wiley-Blackwell |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LT8MwDLbG4AAH3oi3IsSBS1mbpKSB0zQ2AUID8b5VaZrAEGyITvx-nD42kEBC4tRKdfqIE_tz6nwG2FVMcqnQ-ikdCgxQrPCk0pFnmQ7SRONFXhSbEN1u9PAgL2twVO2FKfghRgtubmbk9tpNcJVkjTFpqMqe9T4643ACJimOW16HyeOrzu15ZYjRUeUVOTFCCTwE7mFFLOTTxqjxd3c0xphfkWruajpz_3rJeZgtESZpFkNiAWqmvwgzX3gHl-DtAg3FKwq1M3d0uiEDS67KhUHSQZeGYNYl1JJWkctOPnqKnOZ0s0U5AHKHUbbbd5Udkvve8Ik0x7_CyXBAFLlX1rwTRLOPZhluO-2b1olXll7wNGM09LgVITeJTSLOaKB0IFIpaRpgdOIbQ6PAyEiLg9RPHWMcZQfaUio1ostAWhsptgL1_qBvVoEoliAm1BFHqMFFIlxb6otU8zTkqUjWYK_SQKxLXnJXHuMlLhiVaew6MXaduAY7I9G3gozjJ6HNSo1xOR-zmPpcMI72JsDH5Qr7_QZx8_qs5U7W_y66AdP4eVGRCbkJdVSG2YIp_THsZe_b5cD8BBab53w |
| linkProvider | Wiley-Blackwell |
| linkToHtml | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LTxsxEB5BqEQ5tJSHCKXUqnroZWH9WLyueolSIh4hrSBpclt5vXZJVZKIjfj9jPeRUKmVkHralXa8D489882s_Q3AR82VUBqtnzaRxADFyUBpEweOG5qlBi-KstiE7PXi0Uh9X4Ev9V6Ykh9ikXDzM6Ow136C-4T08ZI1VOe_zBF642gV1gQOo6gBa1-vO4NubYnRUxUlOTFEoQEi96hmFgrZ8aLxn_5oCTKfQtXC13Re_99bbsKrCmOSVjko3sCKnWzBxhPmwW2YfUNTcYdCp7k_eu2QqSPXVWqQdNCpIZz1S2pJu1zNTh7GmpwXhLNlQQDyA-Nsv_Mq_0yG4_ktaS1_hpP5lGgy1M7eE8SzP-0ODDqn_fZZUBVfCAznLAqEk5GwqUtjwRnVhspMKZZRjE9Ca1lMrYqNPMnCzHPGMX5iHGPKIL6kyrlY811oTKYTuwdE8xRRoYkFgg0hU-nbslBmRmSRyGTahE-1ChJTMZP7Ahm_k5JTmSW-ExPfiU34sBCdlXQcfxM6qPWYVDMyT1goJBdocSg-rtDYv2-QtG4u2v5k__mi72H9rH_VTbrnvcu38BI_NS7XRR5AAxVj38EL8zAf5_eH1Sh9BPN462w |
| linkToPdf | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1ZT9wwEB5xCdGHllOlpcVCfeAlkNjOOka8rBaicmhBlGPfIsdHu1W7uyIrfj_jHLsggYTEUyJlnMPjmfnGsb8B-KGY5FKh91M6FpigOBFIpZPAMR2ZXONFXhWbEN1u0uvJyxk4bPbCVPwQkwk3bxmlv_YGbkfG7U9ZQ1XxV-9hNI5nYZ7HsoVmOX90ld6cN54YI1VZkhNTlChA5B43zEIh3Z80fh6PpiDzKVQtY0366X1vuQwfa4xJ2tWgWIEZO1iFD0-YB9dgdIGu4j8KHRf-6LVDho5c1VODJMWghnDWL6klnWo1O3noK3JSEs5WBQHILebZfudVcUDu-uM_pD39GU7GQ6LInXL2niCe_W3X4SY9vu78DOriC4FmjMYBdyLmNnd5whmNlI6EkZKaCPOT0FqaRFYmWrRMaDxnHGUt7SiVGvFlJJ1LFNuAucFwYD8DUSxHVKgTjmCDi1z4tjQURnMTcyPyTdhtVJDpmpncF8j4l1WcyjTznZj5TtyEnYnoqKLjeEloq9FjVltkkdGQC8bR40T4uFJjr98ga_867fiTL28X3YbFy6M0Oz_pnn2FJfzSpFoWuQVzqBf7DRb0w7hf3H-vB-kjnUTq5w |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Optimal+Estimation+of+Rational+Feedforward+Control+via+Instrumental+Variables%3A+With+Application+to+a+Wafer+Stage&rft.jtitle=Asian+journal+of+control&rft.au=Boeren%2C+Frank&rft.au=Blanken%2C+Lennart&rft.au=Bruijnen%2C+Dennis&rft.au=Oomen%2C+Tom&rft.date=2018-05-01&rft.issn=1561-8625&rft.eissn=1934-6093&rft.volume=20&rft.issue=3&rft.spage=975&rft.epage=992&rft_id=info:doi/10.1002%2Fasjc.1595&rft.externalDBID=n%2Fa&rft.externalDocID=10_1002_asjc_1595 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1561-8625&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1561-8625&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1561-8625&client=summon |