ITO/Au/ITO multilayer thin films on transparent polycarbonate with enhanced EMI shielding properties

ITO/Au/ITO multilayer thin films were deposited onto polycarbonate substrate via magnetron sputtering technique without intentional heating. The deposition times of both ITO and Au layers were studied to optimize the overall transparency and conductivity. As-prepared thin films were characterized us...

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Bibliographic Details
Published in:Current applied physics Vol. 20; no. 4; pp. 489 - 497
Main Authors: Erdogan, Nursev, Erden, Fuat, Astarlioglu, A. Taner, Ozdemir, Mehtap, Ozbay, Salih, Aygun, Gulnur, Ozyuzer, Lutfi
Format: Journal Article
Language:English
Published: Elsevier B.V 01.04.2020
한국물리학회
Subjects:
Electromagnetic interference shielding
Gold
Indium-tin oxide
Multilayer thin films
Sputtering
Transparent conductive oxide
물리학
Electromagnetic interference shielding
Gold
Indium-tin oxide
Transparent conductive oxide
Multilayer thin films
Sputtering
ISSN:1567-1739, 1878-1675, 1567-1739
Online Access:Get full text
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Summary:ITO/Au/ITO multilayer thin films were deposited onto polycarbonate substrate via magnetron sputtering technique without intentional heating. The deposition times of both ITO and Au layers were studied to optimize the overall transparency and conductivity. As-prepared thin films were characterized using X-ray diffraction analysis, secondary ion mass spectroscopy, scanning and transmission electron microscopy, atomic force microscopy and physical property measurement system. The optical measurement results revealed that the transmittance of the films were enhanced by increasing the gold deposition time up to 15 s. Beyond this point, further increasing the duration caused a decrease in optical transmittance. Upon optimization of the Au deposition time, the deposition duration of ITO layers was also studied to increase electromagnetic interference (EMI) shielding effectiveness (SE). Maximum EMI SE in this work was measured as 26.8 dB, yielding 99.8% power attenuation, which was verified by simulation results. •ITO/Au/ITO thin films were deposited without substrate heating by magnetron sputtering.•Transparent polycarbonate was used as substrate to converge aerospace applications.•EMI SE of 27 dB was achieved without sacrificing much of the transparency.•Experimental results were confirmed by a simulation study.
ISSN:1567-1739
1878-1675
1567-1739
DOI:10.1016/j.cap.2020.01.012