Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints

With the recent trend towards larger wafer sizes and smaller demand lots recently, there is a growing need for simultaneous production of multiple wafer types in a cluster tool. This presents a more complex scheduling challenge compared to identical types. Previous research primarily focuses on spec...

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Veröffentlicht in:	Expert systems with applications Jg. 269; S. 126443
Hauptverfasser:	Li, Xin, Yang, Wen
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Elsevier Ltd 15.04.2025
Schlagworte:	Cyclic scheduling Mixed integer linear programming Multiple wafer types Residency time constraints Single-arm cluster tools Residency time constraints Single-arm cluster tools Mixed integer linear programming Multiple wafer types Cyclic scheduling
ISSN:	0957-4174
Online-Zugang:	Volltext
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