Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints
With the recent trend towards larger wafer sizes and smaller demand lots recently, there is a growing need for simultaneous production of multiple wafer types in a cluster tool. This presents a more complex scheduling challenge compared to identical types. Previous research primarily focuses on spec...
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| Vydáno v: | Expert systems with applications Ročník 269; s. 126443 |
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| Jazyk: | angličtina |
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Elsevier Ltd
15.04.2025
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| ISSN: | 0957-4174 |
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| Abstract | With the recent trend towards larger wafer sizes and smaller demand lots recently, there is a growing need for simultaneous production of multiple wafer types in a cluster tool. This presents a more complex scheduling challenge compared to identical types. Previous research primarily focuses on specific scenarios limited to the backward sequence, leaving a gap in the handling of more generalized scenarios without sequence restrictions. This paper proposes an approach towards the generalized cyclic scheduling of multiple wafer types in single-arm cluster tools, considering residency time constraints. A comprehensive operational scenario is described, using distinct symbols differentiate processing stages of wafers and their associated process modules. These elements are interconnected through shared process module sets. Based on detailed analysis of operations, a mixed integer linear programming model is proposed to handle the generalized scheduling problem. In the model, precedent relationships of robot operations are well defined, effectively preventing conflicts among them. Additionally, this model ensures the proper sequencing of processing stages in process modules – shared or not – to avoid overlap. Finally, the proposed approach is tested by both illustrative examples, especially including those previously considered unschedulable, and randomly generated instances. Testing results conduct the efficiency and validity of the proposed model.
•Develop a general notation for scheduling multi-type wafers in concurrent processing.•Formulate an MILP as a generalized approach beyond the backward sequences.•Validate and evaluate the approach by illustrative and randomly generated instances. |
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| AbstractList | With the recent trend towards larger wafer sizes and smaller demand lots recently, there is a growing need for simultaneous production of multiple wafer types in a cluster tool. This presents a more complex scheduling challenge compared to identical types. Previous research primarily focuses on specific scenarios limited to the backward sequence, leaving a gap in the handling of more generalized scenarios without sequence restrictions. This paper proposes an approach towards the generalized cyclic scheduling of multiple wafer types in single-arm cluster tools, considering residency time constraints. A comprehensive operational scenario is described, using distinct symbols differentiate processing stages of wafers and their associated process modules. These elements are interconnected through shared process module sets. Based on detailed analysis of operations, a mixed integer linear programming model is proposed to handle the generalized scheduling problem. In the model, precedent relationships of robot operations are well defined, effectively preventing conflicts among them. Additionally, this model ensures the proper sequencing of processing stages in process modules – shared or not – to avoid overlap. Finally, the proposed approach is tested by both illustrative examples, especially including those previously considered unschedulable, and randomly generated instances. Testing results conduct the efficiency and validity of the proposed model.
•Develop a general notation for scheduling multi-type wafers in concurrent processing.•Formulate an MILP as a generalized approach beyond the backward sequences.•Validate and evaluate the approach by illustrative and randomly generated instances. |
| ArticleNumber | 126443 |
| Author | Yang, Wen Li, Xin |
| Author_xml | – sequence: 1 givenname: Xin orcidid: 0000-0002-2469-5420 surname: Li fullname: Li, Xin email: stephenli@eduhk.hk organization: Department of Mathematics and Information Technology, The Education University of Hong Kong, 999077, Hong Kong SAR, China – sequence: 2 givenname: Wen orcidid: 0000-0002-9539-9071 surname: Yang fullname: Yang, Wen email: wenyang@szu.edu.cn organization: College of Management, Shenzhen University, Shenzhen, 518055, China |
| BookMark | eNp9kL1OwzAUhT0UibbwAkx-gQT_JWkkFlTxJ1Vigdly7BvqKrEr26Hk7UlUJoZOZznf0b3fCi2cd4DQHSU5JbS8P-QQTypnhBU5ZaUQfIGWpC6qTNBKXKNVjAdCaEVItUQ_21F3VuOo92CGzrov7FvcD12yWRqPgE-qhRCx9k4PIYBL-Bi8hhjnqnV4zg4yFXqsuyEmCDh530V8smmPA0RrwOkRJ9vDvBJTUNaleIOuWtVFuP3LNfp8fvrYvma795e37eMu05xtUtZAwQnTojQgDBeMNg3TRIGoacFro6qy2dSmMKSpqynBVAVwJbQivJ2aJV8jdt7VwccYoJXHYHsVRkmJnH3Jg5x9ydmXPPuaoM0_SNukkvVuvr67jD6cUZie-rYQZNR2MgDGBtBJGm8v4b8lPI60 |
| CitedBy_id | crossref_primary_10_7232_JKIIE_2025_51_4_288 |
| Cites_doi | 10.1109/TASE.2017.2690443 10.1109/TEM.2020.3037371 10.1080/00207543.2015.1035813 10.1109/TSM.2023.3239198 10.1109/TASE.2018.2868004 10.1007/s10951-015-0448-7 10.1109/TASE.2020.3002560 10.1109/TASE.2022.3203408 10.1109/TASE.2013.2296855 10.1016/j.eswa.2024.124471 10.1109/LRA.2022.3157031 10.1080/0305215X.2017.1310209 10.1109/JAS.2020.1003150 10.1109/TASE.2015.2478482 10.1109/66.705374 10.1109/TSMC.2022.3222915 10.1109/TSM.2011.2180547 10.1109/TASE.2022.3188858 10.1109/TASE.2018.2878063 10.1109/TSM.2013.2281083 10.1109/TSMC.2023.3280207 10.1109/TASE.2021.3061140 10.1109/JAS.2023.123327 10.1109/TASE.2012.2220355 10.1109/JAS.2023.123189 10.3934/jimo.2022137 10.1109/ACCESS.2021.3077503 10.1007/s11771-012-0990-9 |
| ContentType | Journal Article |
| Copyright | 2025 |
| Copyright_xml | – notice: 2025 |
| DBID | AAYXX CITATION |
| DOI | 10.1016/j.eswa.2025.126443 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Computer Science |
| ExternalDocumentID | 10_1016_j_eswa_2025_126443 S095741742500065X |
| GroupedDBID | --K --M .DC .~1 0R~ 13V 1B1 1RT 1~. 1~5 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ 9JN 9JO AAAKF AABNK AACTN AAEDT AAEDW AAIKJ AAKOC AALRI AAOAW AAQFI AARIN AAXKI AAXUO AAYFN ABBOA ABFNM ABJNI ABMAC ABMVD ABUCO ACDAQ ACGFS ACHRH ACNTT ACRLP ACZNC ADBBV ADEZE ADTZH AEBSH AECPX AEIPS AEKER AENEX AFJKZ AFTJW AGHFR AGUBO AGUMN AGYEJ AHHHB AHJVU AHZHX AIALX AIEXJ AIKHN AITUG AKRWK ALEQD ALMA_UNASSIGNED_HOLDINGS AMRAJ ANKPU AOUOD APLSM AXJTR BJAXD BKOJK BLXMC BNSAS CS3 DU5 EBS EFJIC EO8 EO9 EP2 EP3 F5P FDB FIRID FNPLU FYGXN G-Q GBLVA GBOLZ HAMUX IHE J1W JJJVA KOM LG9 LY1 LY7 M41 MO0 N9A O-L O9- OAUVE OZT P-8 P-9 P2P PC. PQQKQ Q38 ROL RPZ SDF SDG SDP SDS SES SEW SPC SPCBC SSB SSD SSL SST SSV SSZ T5K TN5 ~G- 29G 9DU AAAKG AAQXK AATTM AAYWO AAYXX ABKBG ABUFD ABWVN ABXDB ACLOT ACNNM ACRPL ACVFH ADCNI ADJOM ADMUD ADNMO AEUPX AFPUW AGQPQ AIGII AIIUN AKBMS AKYEP APXCP ASPBG AVWKF AZFZN CITATION EFKBS EFLBG EJD FEDTE FGOYB G-2 HLZ HVGLF HZ~ R2- SBC SET WUQ XPP ZMT ~HD |
| ID | FETCH-LOGICAL-c328t-be5302c46de4d3421bb2c0ae491539da76b89d5d0b979d5ed75e3a4ca03fb2c63 |
| ISICitedReferencesCount | 0 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=001399716700001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 0957-4174 |
| IngestDate | Sat Nov 29 08:19:04 EST 2025 Tue Nov 18 22:31:01 EST 2025 Sat Mar 08 15:49:03 EST 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | Residency time constraints Single-arm cluster tools Mixed integer linear programming Multiple wafer types Cyclic scheduling |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c328t-be5302c46de4d3421bb2c0ae491539da76b89d5d0b979d5ed75e3a4ca03fb2c63 |
| ORCID | 0000-0002-9539-9071 0000-0002-2469-5420 |
| ParticipantIDs | crossref_primary_10_1016_j_eswa_2025_126443 crossref_citationtrail_10_1016_j_eswa_2025_126443 elsevier_sciencedirect_doi_10_1016_j_eswa_2025_126443 |
| PublicationCentury | 2000 |
| PublicationDate | 2025-04-15 |
| PublicationDateYYYYMMDD | 2025-04-15 |
| PublicationDate_xml | – month: 04 year: 2025 text: 2025-04-15 day: 15 |
| PublicationDecade | 2020 |
| PublicationTitle | Expert systems with applications |
| PublicationYear | 2025 |
| Publisher | Elsevier Ltd |
| Publisher_xml | – name: Elsevier Ltd |
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| SSID | ssj0017007 |
| Score | 2.460805 |
| Snippet | With the recent trend towards larger wafer sizes and smaller demand lots recently, there is a growing need for simultaneous production of multiple wafer types... |
| SourceID | crossref elsevier |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 126443 |
| SubjectTerms | Cyclic scheduling Mixed integer linear programming Multiple wafer types Residency time constraints Single-arm cluster tools |
| Title | Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints |
| URI | https://dx.doi.org/10.1016/j.eswa.2025.126443 |
| Volume | 269 |
| WOSCitedRecordID | wos001399716700001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVESC databaseName: Elsevier SD Freedom Collection Journals 2021 issn: 0957-4174 databaseCode: AIEXJ dateStart: 19950101 customDbUrl: isFulltext: true dateEnd: 99991231 titleUrlDefault: https://www.sciencedirect.com omitProxy: false ssIdentifier: ssj0017007 providerName: Elsevier |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwELZgy4ELb0R5yQdulav4kY1zrKoi4FBxKGI5RX5F2ipkV7tbuv33jB9xlqpU9MAliSLHsTJf7JnxzDcIfXBTSp3jinChwEBphSVaMUuooroV2tWFlaHYRHV6Kmez-msKG1uHcgJV38vttl7-V1HDPRC2T529g7hzp3ADrkHocASxw_GfBH98ZTxxNVitsIp0Kag5xA2S4G-9VK1P2gU72CRupmVMFkjZLf7cOaJWPw9Md-F5FEA_XXQpDQ6s81CG9CpUpfe9rEOViUgIlX38nkB5k2iihwS6na3yHAYUYglm84zQH8l9_T1lqCV_BCv91krMyMyOxYoIGmvvDHMsi_VY0ixJvRbGb5zAoy_h_NCtLz0rFCsPx8Z_smVfW8VybOEQtnbe-D4a30cT-7iP9lhV1nKC9o4-n8y-5N2mqohp9cPIU3JVjAO8PpKbFZgdpeTsCXqUrAl8FFHwFN1z_TP0eKjUgdPE_RxtIyjwCAq8aPEIChxBgUdQ4BEUeN7jERQ4gQIHUGAvWpxBgT0o8A4oXqBvH0_Ojj-RVHODGM7khmjny0gZMbVOWC4Y1ZqZQjlRw9JYW1VNtaxtaQtdV3B2tirhTxdGFbyFllP-Ek36Re9eIcwLI5Sl0pZaCG25dEIIwzSsKlJzXe8jOnzIxiRCej-4rvm7CPfRQX5mGelYbm1dDvJpkkIZFcUG4HbLc6_v9JY36OH4H7xFk83qwr1DD8yvzXy9ep-w9htMbp5K |
| linkProvider | Elsevier |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Cyclic+scheduling+of+multi-type+wafers+concurrent+processing+in+single-arm+cluster+tools+with+residency+time+constraints&rft.jtitle=Expert+systems+with+applications&rft.au=Li%2C+Xin&rft.au=Yang%2C+Wen&rft.date=2025-04-15&rft.issn=0957-4174&rft.volume=269&rft.spage=126443&rft_id=info:doi/10.1016%2Fj.eswa.2025.126443&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_eswa_2025_126443 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0957-4174&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0957-4174&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0957-4174&client=summon |