Defocus compensation scheme for femtosecond laser direct writing of large-area non-periodic micro-structures

•The processing range of the femtosecond laser platform was limited by shifting of the focus.•A defocus compensation scheme (DCS) for femtosecond laser direct writing was proposed.•The DCS comprises of an optimized DFF method and the bilinear interpolation algorithm.•A Laplace-DWT evaluation functio...

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Vydané v:	Optics and lasers in engineering Ročník 172; s. 107836
Hlavní autori:	Xie, Yu, Lin, Zhihai, Yu, Gaowen, Chen, Hui, Chen, Jianxiong
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Elsevier Ltd 01.01.2024
Predmet:	Bilinear interpolation Defocus compensation Depth from focus Femtosecond laser Laplace-DWT sharpness evaluation function Femtosecond laser Defocus compensation Laplace-DWT sharpness evaluation function Depth from focus Bilinear interpolation
ISSN:	0143-8166
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