Enhancing selectivity and sensitivity in gas sensors through noble metal-decorated ZnO and machine learning
[Display omitted] •ZnO thin films with Ir, Ru, and IrRu alloys via ALD were explored for hazardous gas detection with enhanced performance.•Noble metals improved gas-sensing via electronic and chemical sensitization, ensuring stable, reliable, and selective responses.•Surface-engineered metal oxide...
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| Published in: | Applied surface science Vol. 693; p. 162750 |
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| Main Authors: | , , , , , , , , , , , , , , |
| Format: | Journal Article |
| Language: | English |
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Elsevier B.V
01.06.2025
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| ISSN: | 0169-4332 |
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| Abstract | [Display omitted]
•ZnO thin films with Ir, Ru, and IrRu alloys via ALD were explored for hazardous gas detection with enhanced performance.•Noble metals improved gas-sensing via electronic and chemical sensitization, ensuring stable, reliable, and selective responses.•Surface-engineered metal oxide gas sensors exhibited exceptional stability, reliability, and selectivity in gas detection.•Machine learning-based data analysis enabled 100% accurate classification, enhancing gas selectivity in metal oxide sensors.
The growing need for highly sensitive and selective gas sensors has spurred extensive research on enhancing metal–oxide–semiconductor-based sensors. In this study, we explored the gas-sensing performance of ZnO thin films functionalized with noble metals (Ir, Ru, and IrRu alloys) via atomic layer deposition for the detection of hazardous gases. The incorporation of noble metals led to significant improvements in the gas-sensing behavior driven by both electronic and chemical sensitization mechanisms. To further enhance gas selectivity, machine learning-based data analysis was employed, enabling precise classification of various gases with 100 % accuracy. These findings underscore the potential of noble metal-functionalized ZnO sensors for advanced gas detection, illustrating the effective combination of material engineering and cutting-edge data analysis techniques for the development of intelligent, selective, and stable gas sensor platforms. |
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| AbstractList | [Display omitted]
•ZnO thin films with Ir, Ru, and IrRu alloys via ALD were explored for hazardous gas detection with enhanced performance.•Noble metals improved gas-sensing via electronic and chemical sensitization, ensuring stable, reliable, and selective responses.•Surface-engineered metal oxide gas sensors exhibited exceptional stability, reliability, and selectivity in gas detection.•Machine learning-based data analysis enabled 100% accurate classification, enhancing gas selectivity in metal oxide sensors.
The growing need for highly sensitive and selective gas sensors has spurred extensive research on enhancing metal–oxide–semiconductor-based sensors. In this study, we explored the gas-sensing performance of ZnO thin films functionalized with noble metals (Ir, Ru, and IrRu alloys) via atomic layer deposition for the detection of hazardous gases. The incorporation of noble metals led to significant improvements in the gas-sensing behavior driven by both electronic and chemical sensitization mechanisms. To further enhance gas selectivity, machine learning-based data analysis was employed, enabling precise classification of various gases with 100 % accuracy. These findings underscore the potential of noble metal-functionalized ZnO sensors for advanced gas detection, illustrating the effective combination of material engineering and cutting-edge data analysis techniques for the development of intelligent, selective, and stable gas sensor platforms. |
| ArticleNumber | 162750 |
| Author | Lim, Min Hyeok Han, Jin Kyu Park, Seoungwoong Lim, Jongsun Kwon, Yeong Min Song, Wooseok Kang, Saewon Kim, Soo-Hyun Lee, Sun Sook Jang, Moonjeong Myung, Sung Lee, Do Hyung Yim, Soonmin Bae, Garam Son, Yeseul |
| Author_xml | – sequence: 1 givenname: Yeong Min surname: Kwon fullname: Kwon, Yeong Min organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 2 givenname: Yeseul surname: Son fullname: Son, Yeseul organization: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea – sequence: 3 givenname: Do Hyung surname: Lee fullname: Lee, Do Hyung organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 4 givenname: Min Hyeok surname: Lim fullname: Lim, Min Hyeok organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 5 givenname: Jin Kyu surname: Han fullname: Han, Jin Kyu organization: Institute of Materials Research and Engineering, ASTAR (Agency for Science, Technology and Research), 138634 Singapore, Singapore – sequence: 6 givenname: Moonjeong surname: Jang fullname: Jang, Moonjeong organization: National Nano Fab Center (NNFC), Daejeon 34141, Republic of Korea – sequence: 7 givenname: Seoungwoong orcidid: 0000-0002-5958-4050 surname: Park fullname: Park, Seoungwoong organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 8 givenname: Saewon surname: Kang fullname: Kang, Saewon organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 9 givenname: Soonmin surname: Yim fullname: Yim, Soonmin organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 10 givenname: Sung surname: Myung fullname: Myung, Sung organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 11 givenname: Jongsun surname: Lim fullname: Lim, Jongsun organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 12 givenname: Sun Sook surname: Lee fullname: Lee, Sun Sook organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea – sequence: 13 givenname: Garam surname: Bae fullname: Bae, Garam email: grbae@dankook.ac.kr organization: Department of Physics, Dankook University, Cheonan 31116, Republic of Korea – sequence: 14 givenname: Soo-Hyun orcidid: 0000-0003-3748-2755 surname: Kim fullname: Kim, Soo-Hyun email: soohyunsq@unist.ac.kr organization: School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea – sequence: 15 givenname: Wooseok orcidid: 0000-0002-0487-2055 surname: Song fullname: Song, Wooseok email: wssong@krict.re.kr organization: Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Yuseong-gu, Daejeon 34114, Republic of Korea |
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| Keywords | Pattern recognition algorithm Next-generation gas sensors Functionalization Sensor array |
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