Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling
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| Published in: | Surface & coatings technology Vol. 447; p. 128880 |
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| Main Authors: | , , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
15.10.2022
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| ISSN: | 0257-8972 |
| Online Access: | Get full text |
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