Rao, Z., Su, T., Koenig, T., Thompson, G. B., Depla, D., & Chason, E. (2022). Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling. Surface & coatings technology, 447, 128880. https://doi.org/10.1016/j.surfcoat.2022.128880
Citace podle Chicago (17th ed.)Rao, Zhaoxia, Tong Su, Thomas Koenig, Gregory B. Thompson, Diederik Depla, a Eric Chason. "Effect of Processing Conditions on Residual Stress in Sputtered Transition Metal Nitrides (TiN, ZrN and TaN): Experiments and Modeling." Surface & Coatings Technology 447 (2022): 128880. https://doi.org/10.1016/j.surfcoat.2022.128880.
Citace podle MLA (9th ed.)Rao, Zhaoxia, et al. "Effect of Processing Conditions on Residual Stress in Sputtered Transition Metal Nitrides (TiN, ZrN and TaN): Experiments and Modeling." Surface & Coatings Technology, vol. 447, 2022, p. 128880, https://doi.org/10.1016/j.surfcoat.2022.128880.