APA (7th ed.) Citation

Rao, Z., Su, T., Koenig, T., Thompson, G. B., Depla, D., & Chason, E. (2022). Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling. Surface & coatings technology, 447, 128880. https://doi.org/10.1016/j.surfcoat.2022.128880

Chicago Style (17th ed.) Citation

Rao, Zhaoxia, Tong Su, Thomas Koenig, Gregory B. Thompson, Diederik Depla, and Eric Chason. "Effect of Processing Conditions on Residual Stress in Sputtered Transition Metal Nitrides (TiN, ZrN and TaN): Experiments and Modeling." Surface & Coatings Technology 447 (2022): 128880. https://doi.org/10.1016/j.surfcoat.2022.128880.

MLA (9th ed.) Citation

Rao, Zhaoxia, et al. "Effect of Processing Conditions on Residual Stress in Sputtered Transition Metal Nitrides (TiN, ZrN and TaN): Experiments and Modeling." Surface & Coatings Technology, vol. 447, 2022, p. 128880, https://doi.org/10.1016/j.surfcoat.2022.128880.