CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording-Characterization and Application

This paper reports on the characterization and intracortical recording performance of high-density complementary-metal-oxide-semiconductor (CMOS)-based silicon microprobe arrays. They comprise multiplexing units integrated on the probe shafts being part of the signal transmission path. Their electri...

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Veröffentlicht in:Journal of microelectromechanical systems Jg. 21; H. 6; S. 1426 - 1435
Hauptverfasser: Seidl, K., Schwaerzle, M., Ulbert, I., Neves, H. P., Paul, O., Ruther, P.
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York, NY IEEE 01.12.2012
Institute of Electrical and Electronics Engineers
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ISSN:1057-7157, 1941-0158
Online-Zugang:Volltext
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