Hybrid tabu search algorithm for unrelated parallel machine scheduling in semiconductor fabs with setup times, job release, and expired times

•Scheduling problem of ion implantation process of wafer fabrication.•Considering unrelated parallel machine scheduling with sequence-dependent setup times.•Considering job release time and expired time.•Maximizing the number of processed jobs, minimizing the maximum makespan.•Considering mixed-inte...

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Bibliographic Details
Published in:	Computers & industrial engineering Vol. 165; p. 107915
Main Authors:	Chen, Changyu, Fathi, Mahdi, Khakifirooz, Marzieh, Wu, Kan
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01.03.2022
Subjects:	Expired times Job release Mixed integer programming Scheduling Setup times Tabu search Unrelated parallel machines Wafer fabrication Tabu search Unrelated parallel machines Setup times Job release Expired times Wafer fabrication Mixed integer programming Scheduling
ISSN:	0360-8352, 1879-0550
Online Access:	Get full text
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