Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes

Defective wafer detection is essential to avoid loss of yield due to process abnormalities in semiconductor manufacturing. For most complex processes in semiconductor manufacturing, various sensors are installed on equipment to capture process information and equipment conditions, including pressure...

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Vydané v:	Advanced engineering informatics Ročník 46; s. 101166
Hlavní autori:	Fan, Shu-Kai S., Hsu, Chia-Yu, Jen, Chih-Hung, Chen, Kuan-Lung, Juan, Li-Ting
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Elsevier Ltd 01.10.2020
Predmet:	Anomaly detection Autoencoder Deep learning Hampel identifier Semiconductor Deep learning Semiconductor Hampel identifier Autoencoder Anomaly detection
ISSN:	1474-0346, 1873-5320
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