Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes

Defective wafer detection is essential to avoid loss of yield due to process abnormalities in semiconductor manufacturing. For most complex processes in semiconductor manufacturing, various sensors are installed on equipment to capture process information and equipment conditions, including pressure...

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Bibliographic Details

Published in:	Advanced engineering informatics Vol. 46; p. 101166
Main Authors:	Fan, Shu-Kai S., Hsu, Chia-Yu, Jen, Chih-Hung, Chen, Kuan-Lung, Juan, Li-Ting
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01.10.2020
Subjects:	Anomaly detection Autoencoder Deep learning Hampel identifier Semiconductor Deep learning Semiconductor Hampel identifier Autoencoder Anomaly detection
ISSN:	1474-0346, 1873-5320
Online Access:	Get full text
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