Fan, S. S., Hsu, C., Jen, C., Chen, K., & Juan, L. (2020). Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes. Advanced engineering informatics, 46, 101166. https://doi.org/10.1016/j.aei.2020.101166
Chicago-Zitierstil (17. Ausg.)Fan, Shu-Kai S., Chia-Yu Hsu, Chih-Hung Jen, Kuan-Lung Chen, und Li-Ting Juan. "Defective Wafer Detection Using a Denoising Autoencoder for Semiconductor Manufacturing Processes." Advanced Engineering Informatics 46 (2020): 101166. https://doi.org/10.1016/j.aei.2020.101166.
MLA-Zitierstil (9. Ausg.)Fan, Shu-Kai S., et al. "Defective Wafer Detection Using a Denoising Autoencoder for Semiconductor Manufacturing Processes." Advanced Engineering Informatics, vol. 46, 2020, p. 101166, https://doi.org/10.1016/j.aei.2020.101166.