Lablali, Y., Oubaki, R., Ghailane, A., Alami, J., & Makha, M. (2024). Correlation between sputtering method, microstructure and properties of TiOx thin films deposited by reactive direct-current and high-power impulse magnetron sputtering. Thin solid films, 808, 140573. https://doi.org/10.1016/j.tsf.2024.140573
Chicago Style (17th ed.) CitationLablali, Younes, Rachid Oubaki, Anas Ghailane, Jones Alami, and Mohammed Makha. "Correlation Between Sputtering Method, Microstructure and Properties of TiOx Thin Films Deposited by Reactive Direct-current and High-power Impulse Magnetron Sputtering." Thin Solid Films 808 (2024): 140573. https://doi.org/10.1016/j.tsf.2024.140573.
MLA (9th ed.) CitationLablali, Younes, et al. "Correlation Between Sputtering Method, Microstructure and Properties of TiOx Thin Films Deposited by Reactive Direct-current and High-power Impulse Magnetron Sputtering." Thin Solid Films, vol. 808, 2024, p. 140573, https://doi.org/10.1016/j.tsf.2024.140573.