Biocompatibility of a quad-shank neural probe

•Demonstrated fabrication of flexible neural probes using standard CMOS techniques.•The probe comprised gold pyramidal electrodes sandwiched between polyimide layers.•The electrode test impedance values at 1kHz are on average 135kΩ.•MWCNTs were deposited on electrodes resulting in impedance at 1kHz...

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Bibliographic Details

Published in:	Solid-state electronics Vol. 136; pp. 113 - 119
Main Authors:	Tyson, Joel, Tran, Minhquan, Slaughter, Gymama
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01.10.2017
Subjects:	High density electrode array MEMS Neural probe Neural probe MEMS High density electrode array
ISSN:	0038-1101, 1879-2405
Online Access:	Get full text
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