CMOS Neural Probe With 1600 Close-Packed Recording Sites and 32 Analog Output Channels
This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cro...
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| Veröffentlicht in: | Journal of microelectromechanical systems Jg. 27; H. 6; S. 1023 - 1034 |
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| Sprache: | Englisch |
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IEEE
01.12.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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| Abstract | This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cross-section of <inline-formula> <tex-math notation="LaTeX">100\times 50\,\mu \text{m}^{2} </tex-math></inline-formula> and a length of 10 or 5 mm emerging from a base with dimensions of only <inline-formula> <tex-math notation="LaTeX">0.55\times 1.8 </tex-math></inline-formula> mm 2 . The shafts carry 1600 and 800 recording sites, respectively, grouped into 50 (respectively 25) blocks of <inline-formula> <tex-math notation="LaTeX">4\times 8 </tex-math></inline-formula> electrodes with an area of <inline-formula> <tex-math notation="LaTeX">17\times 17\,\mu \text{m}^{2} </tex-math></inline-formula> each, a pitch of 20 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>, and an electrode-to-electrode spacing of 3 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>. The probes are fabricated using a commercial 0.18 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> CMOS process followed by dedicated metallization, passivation, and microfabrication steps. Neural signals are accessible through 32 analog output channels via a hierarchical digital addressing scheme implementing an advanced electronic depth control concept giving the option of multiple scanning modes and offering a switching time of 416 <inline-formula> <tex-math notation="LaTeX">\mu \text{s} </tex-math></inline-formula> at a clock frequency of 1 MHz. All output channels are shielded against each other, whereby crosstalk between neighboring channels is measured to be −58 dB at 1 kHz. Absolute impedance values at 1 kHz of single IrO x and Pt electrodes are <inline-formula> <tex-math notation="LaTeX">230\pm 38~\text{k}\Omega </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">2.2\pm 0.3~\text{M}\Omega </tex-math></inline-formula>, respectively. In vivo recordings taking advantage of the new addressing concept for high-resolution recordings from multiple brain regions were successfully performed in anesthetized rats. [2018-0152] |
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| AbstractList | This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cross-section of <inline-formula> <tex-math notation="LaTeX">100\times 50\,\mu \text{m}^{2} </tex-math></inline-formula> and a length of 10 or 5 mm emerging from a base with dimensions of only <inline-formula> <tex-math notation="LaTeX">0.55\times 1.8 </tex-math></inline-formula> mm 2 . The shafts carry 1600 and 800 recording sites, respectively, grouped into 50 (respectively 25) blocks of <inline-formula> <tex-math notation="LaTeX">4\times 8 </tex-math></inline-formula> electrodes with an area of <inline-formula> <tex-math notation="LaTeX">17\times 17\,\mu \text{m}^{2} </tex-math></inline-formula> each, a pitch of 20 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>, and an electrode-to-electrode spacing of 3 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>. The probes are fabricated using a commercial 0.18 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> CMOS process followed by dedicated metallization, passivation, and microfabrication steps. Neural signals are accessible through 32 analog output channels via a hierarchical digital addressing scheme implementing an advanced electronic depth control concept giving the option of multiple scanning modes and offering a switching time of 416 <inline-formula> <tex-math notation="LaTeX">\mu \text{s} </tex-math></inline-formula> at a clock frequency of 1 MHz. All output channels are shielded against each other, whereby crosstalk between neighboring channels is measured to be −58 dB at 1 kHz. Absolute impedance values at 1 kHz of single IrO x and Pt electrodes are <inline-formula> <tex-math notation="LaTeX">230\pm 38~\text{k}\Omega </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">2.2\pm 0.3~\text{M}\Omega </tex-math></inline-formula>, respectively. In vivo recordings taking advantage of the new addressing concept for high-resolution recordings from multiple brain regions were successfully performed in anesthetized rats. [2018-0152] This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cross-section of [Formula Omitted] and a length of 10 or 5 mm emerging from a base with dimensions of only [Formula Omitted] mm2. The shafts carry 1600 and 800 recording sites, respectively, grouped into 50 (respectively 25) blocks of [Formula Omitted] electrodes with an area of [Formula Omitted] each, a pitch of 20 [Formula Omitted], and an electrode-to-electrode spacing of 3 [Formula Omitted]. The probes are fabricated using a commercial 0.18 [Formula Omitted] CMOS process followed by dedicated metallization, passivation, and microfabrication steps. Neural signals are accessible through 32 analog output channels via a hierarchical digital addressing scheme implementing an advanced electronic depth control concept giving the option of multiple scanning modes and offering a switching time of 416 [Formula Omitted] at a clock frequency of 1 MHz. All output channels are shielded against each other, whereby crosstalk between neighboring channels is measured to be −58 dB at 1 kHz. Absolute impedance values at 1 kHz of single IrOx and Pt electrodes are [Formula Omitted] and [Formula Omitted], respectively. In vivo recordings taking advantage of the new addressing concept for high-resolution recordings from multiple brain regions were successfully performed in anesthetized rats. [2018-0152] |
| Author | Sayed Herbawi, Abdalrahman Hofmann, Ulrich G. Christ, Olaf Paul, Oliver Ruther, Patrick Kiessner, Lukas Mottaghi, Soheil |
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| SubjectTerms | Brain Channels CMOS CMOS MEMS CMOS technology Crosstalk Electrodes hierarchical addressing scheme High resolution high-density electrode array high-density neural recording Metallizing Microelectromechanical systems Micromechanical devices Neural probe neurotechnology Probes Recording Signal processing |
| Title | CMOS Neural Probe With 1600 Close-Packed Recording Sites and 32 Analog Output Channels |
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