CMOS Neural Probe With 1600 Close-Packed Recording Sites and 32 Analog Output Channels

This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cro...

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Published in:Journal of microelectromechanical systems Vol. 27; no. 6; pp. 1023 - 1034
Main Authors: Sayed Herbawi, Abdalrahman, Christ, Olaf, Kiessner, Lukas, Mottaghi, Soheil, Hofmann, Ulrich G., Paul, Oliver, Ruther, Patrick
Format: Journal Article
Language:English
Published: New York IEEE 01.12.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:
Brain
Channels
CMOS
CMOS MEMS
CMOS technology
Crosstalk
Electrodes
hierarchical addressing scheme
High resolution
high-density electrode array
high-density neural recording
Metallizing
Microelectromechanical systems
Micromechanical devices
Neural probe
neurotechnology
Probes
Recording
Signal processing
ISSN:1057-7157, 1941-0158
Online Access:Get full text
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Summary:This paper reports on the development, characterization, and validation of neural probes serving the growing needs of neuroscience for miniaturized tools enabling simultaneous high-resolution recording of neural activity in multiple brain areas. The probes consist of a needle-shaped shaft with a cross-section of <inline-formula> <tex-math notation="LaTeX">100\times 50\,\mu \text{m}^{2} </tex-math></inline-formula> and a length of 10 or 5 mm emerging from a base with dimensions of only <inline-formula> <tex-math notation="LaTeX">0.55\times 1.8 </tex-math></inline-formula> mm 2 . The shafts carry 1600 and 800 recording sites, respectively, grouped into 50 (respectively 25) blocks of <inline-formula> <tex-math notation="LaTeX">4\times 8 </tex-math></inline-formula> electrodes with an area of <inline-formula> <tex-math notation="LaTeX">17\times 17\,\mu \text{m}^{2} </tex-math></inline-formula> each, a pitch of 20 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>, and an electrode-to-electrode spacing of 3 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula>. The probes are fabricated using a commercial 0.18 <inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> CMOS process followed by dedicated metallization, passivation, and microfabrication steps. Neural signals are accessible through 32 analog output channels via a hierarchical digital addressing scheme implementing an advanced electronic depth control concept giving the option of multiple scanning modes and offering a switching time of 416 <inline-formula> <tex-math notation="LaTeX">\mu \text{s} </tex-math></inline-formula> at a clock frequency of 1 MHz. All output channels are shielded against each other, whereby crosstalk between neighboring channels is measured to be −58 dB at 1 kHz. Absolute impedance values at 1 kHz of single IrO x and Pt electrodes are <inline-formula> <tex-math notation="LaTeX">230\pm 38~\text{k}\Omega </tex-math></inline-formula> and <inline-formula> <tex-math notation="LaTeX">2.2\pm 0.3~\text{M}\Omega </tex-math></inline-formula>, respectively. In vivo recordings taking advantage of the new addressing concept for high-resolution recordings from multiple brain regions were successfully performed in anesthetized rats. [2018-0152]
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2018.2872619