SPICE-Based Multiphysics Model to Analyze the Dynamics of Ferroelectric Negative-Capacitance-Electrostatic MEMS Hybrid Actuators

We propose a Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics framework to model ferroelectric negative-capacitance-electrostatic microelectromechanical systems (MEMS) hybrid actuators. Our approach couples the nonlinear dynamics of both the ferroelectric capacitor and...

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Bibliographic Details
Published in:	IEEE transactions on electron devices Vol. 67; no. 11; pp. 5174 - 5181
Main Authors:	Raman, Raghuram Tattamangalam, Ajoy, Arvind
Format:	Journal Article
Language:	English
Published:	New York IEEE 01.11.2020 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Actuation Actuation energy Actuators Capacitance Capacitors dynamic pull-in Dynamic response Dynamical systems Electronic devices electrostatic microelectromechanical systems (MEMS) actuator Electrostatics Energy consumption Ferroelectric materials ferroelectric negative capacitance Ferroelectricity Hybrid systems Integrated circuit modeling Integrated circuits Mathematical model Microelectromechanical systems Micromechanical devices Nonlinear dynamics Reduction Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics Simulators SPICE
ISSN:	0018-9383, 1557-9646
Online Access:	Get full text
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