SPICE-Based Multiphysics Model to Analyze the Dynamics of Ferroelectric Negative-Capacitance-Electrostatic MEMS Hybrid Actuators

We propose a Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics framework to model ferroelectric negative-capacitance-electrostatic microelectromechanical systems (MEMS) hybrid actuators. Our approach couples the nonlinear dynamics of both the ferroelectric capacitor and...

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Published in:	IEEE transactions on electron devices Vol. 67; no. 11; pp. 5174 - 5181
Main Authors:	Raman, Raghuram Tattamangalam, Ajoy, Arvind
Format:	Journal Article
Language:	English
Published:	New York IEEE 01.11.2020 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Actuation Actuation energy Actuators Capacitance Capacitors dynamic pull-in Dynamic response Dynamical systems Electronic devices electrostatic microelectromechanical systems (MEMS) actuator Electrostatics Energy consumption Ferroelectric materials ferroelectric negative capacitance Ferroelectricity Hybrid systems Integrated circuit modeling Integrated circuits Mathematical model Microelectromechanical systems Micromechanical devices Nonlinear dynamics Reduction Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics Simulators SPICE
ISSN:	0018-9383, 1557-9646
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Abstract	We propose a Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics framework to model ferroelectric negative-capacitance-electrostatic microelectromechanical systems (MEMS) hybrid actuators. Our approach couples the nonlinear dynamics of both the ferroelectric capacitor and the MEMS actuator. Using this framework, we examine the dynamic response and the energy consumed during pull-in switching of the hybrid actuator. We predict a significant reduction in the dynamic pull-in and pull-out voltages and the energy consumed by the hybrid actuator compared with the standalone MEMS actuator. We also predict that the pull-in time of the hybrid actuator is, however, larger than that of the standalone actuator. Nevertheless, we show that one can tradeoff a small part of the reduction in actuation voltage to achieve identical pull-in times in the hybrid and standalone MEMS actuators while still consuming substantially lower energy in the former compared with the latter. Our analysis approach is compatible with standard circuit simulators and is, hence, suitable for analysis and evaluation of various heterogeneous systems consisting of hybrid MEMS actuators and other electronic devices.
AbstractList	We propose a Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics framework to model ferroelectric negative-capacitance–electrostatic microelectromechanical systems (MEMS) hybrid actuators. Our approach couples the nonlinear dynamics of both the ferroelectric capacitor and the MEMS actuator. Using this framework, we examine the dynamic response and the energy consumed during pull-in switching of the hybrid actuator. We predict a significant reduction in the dynamic pull-in and pull-out voltages and the energy consumed by the hybrid actuator compared with the standalone MEMS actuator. We also predict that the pull-in time of the hybrid actuator is, however, larger than that of the standalone actuator. Nevertheless, we show that one can tradeoff a small part of the reduction in actuation voltage to achieve identical pull-in times in the hybrid and standalone MEMS actuators while still consuming substantially lower energy in the former compared with the latter. Our analysis approach is compatible with standard circuit simulators and is, hence, suitable for analysis and evaluation of various heterogeneous systems consisting of hybrid MEMS actuators and other electronic devices.
Author	Ajoy, Arvind Raman, Raghuram Tattamangalam
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SubjectTerms	Actuation Actuation energy Actuators Capacitance Capacitors dynamic pull-in Dynamic response Dynamical systems Electronic devices electrostatic microelectromechanical systems (MEMS) actuator Electrostatics Energy consumption Ferroelectric materials ferroelectric negative capacitance Ferroelectricity Hybrid systems Integrated circuit modeling Integrated circuits Mathematical model Microelectromechanical systems Micromechanical devices Nonlinear dynamics Reduction Simulation Program with Integrated Circuit Emphasis (SPICE)-based multiphysics Simulators SPICE
Title	SPICE-Based Multiphysics Model to Analyze the Dynamics of Ferroelectric Negative-Capacitance-Electrostatic MEMS Hybrid Actuators
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