An Intelligent Particle Filter With Adaptive M-H Resampling for Liquid-Level Estimation During Silicon Crystal Growth
During the growth of silicon single crystals, it is critical to detect the liquid level of the silicon melt to ensure their high-quality production. Because noise statistics are difficult to determine in measured values of the liquid level, a particle filter (PF) with unknown statistics has been pre...
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| Vydané v: | IEEE transactions on instrumentation and measurement Ročník 70; s. 1 - 12 |
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| Hlavní autori: | , , , |
| Médium: | Journal Article |
| Jazyk: | English |
| Vydavateľské údaje: |
New York
IEEE
2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Predmet: | |
| ISSN: | 0018-9456, 1557-9662 |
| On-line prístup: | Získať plný text |
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