An Intelligent Particle Filter With Adaptive M-H Resampling for Liquid-Level Estimation During Silicon Crystal Growth

During the growth of silicon single crystals, it is critical to detect the liquid level of the silicon melt to ensure their high-quality production. Because noise statistics are difficult to determine in measured values of the liquid level, a particle filter (PF) with unknown statistics has been pre...

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Veröffentlicht in:	IEEE transactions on instrumentation and measurement Jg. 70; S. 1 - 12
Hauptverfasser:	Zhang, Xinyu, Liu, Ding, Yang, Yuan, Liang, Junli
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 2021 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Adaptive filters Adaptive Metropolis–Hastings (M-H) Resampling Algorithms Atmospheric measurements Crossovers Crystal growth Estimation Furnaces Heuristic methods intelligent particle filter (PF) Liquid levels liquid-level detection Liquids Low weight Mutation Noise measurement Resampling Silicon silicon crystal growth Single crystals Strategy
ISSN:	0018-9456, 1557-9662
Online-Zugang:	Volltext
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