Pre-production estimates for the choice of strategy and algorithm for monochromatic monitoring of the production of optical coatings

The paper proposes an approach for the pre-production selection of the most promising combination of a monochromatic monitoring strategy and a monitoring algorithm used for predicting termination of layer deposition. The approach is based on the previously introduced estimate of the strength of the...

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Bibliographic Details
Published in:Applied optics. Optical technology and biomedical optics Vol. 62; no. 18; p. 4906
Main Authors: Tikhonravov, A, Lagutina, A, Lagutin, Iu, Yagola, A
Format: Journal Article
Language:English
Published: 20.06.2023
ISSN:1539-4522, 1539-4522
Online Access:Get more information
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