Fabrication of microchannels through template-based electrophoretically assisted micro-ultrasonic machining

   Silicon, glass, and other hard and brittle materials exhibit strong inertness and chemical stability and are ideal substrates for preparing macrochannels. To prepare microchannels with hard and brittle material through high-precision and high-efficiency machining, the author innovatively proposed...

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Veröffentlicht in:International journal of advanced manufacturing technology Jg. 129; H. 11-12; S. 5287 - 5302
Hauptverfasser: Lian, Haishan, Deng, Cuiyuan, Zhang, Linpeng, Mo, Yuandong, He, Junfeng, Guo, Zhongning
Format: Journal Article
Sprache:Englisch
Veröffentlicht: London Springer London 01.12.2023
Springer Nature B.V
Schlagworte:
Brittle materials
Brittleness
CAE) and Design
Computer-Aided Engineering (CAD
Electric potential
Electrophoresis
Engineering
Industrial and Production Engineering
Material removal rate (machining)
Mechanical Engineering
Media Management
Microchannels
New technology
Original Article
Particle size
Process parameters
Substrates
Surface roughness
Ultrafines
Ultrasonic machining
Voltage
Workpieces
Micro-ultrasonic machining
Experimental research
Hard and brittle material
Microchannel machining
Electrophoretically assisted
ISSN:0268-3768, 1433-3015
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Zusammenfassung:   Silicon, glass, and other hard and brittle materials exhibit strong inertness and chemical stability and are ideal substrates for preparing macrochannels. To prepare microchannels with hard and brittle material through high-precision and high-efficiency machining, the author innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). The microchannel shape punch-pin was transferred to a workpiece by micro-ultrasonic machining (MUSM). Due to the electrophoretic characteristics of ultrafine abrasive particles, applying a DC field can ensure that ultrafine abrasive particles are present in the machining area. Four process parameter (average particle size, particle concentration, ultrasonic power, and electrophoretic DC voltage) single-factor experiments and orthogonal experiments were carried out for TBEPAMUSM. The single-factor experimental study indicated that (1) an increase in the average particle size and ultrasonic power can effectively improve the material removal rate (MRR), but the surface roughness (SR) also decreases. (2) An increase in the abrasive concentration reduces the SR, but a suitable concentration can maximize the MRR. (3) When a suitable DC voltage is introduced, the MRR and SR can be effectively improved. The orthogonal experiment results show that the average particle size exerts the greatest effect on the SR and MRR. Considering the balance between machining quality and machining efficiency, the optimal parameters were as follows: ultrasonic power 70%, average abrasive particle size 18 μm, abrasive concentration 18%, and DC voltage 40 V.
Bibliographie:ObjectType-Article-1
SourceType-Scholarly Journals-1
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content type line 14
ISSN:0268-3768
1433-3015
DOI:10.1007/s00170-023-12605-5