An innovative multi-parameter fusion compensation algorithm for ZRO drift of MEMS gyroscope under full-temperature conditions
The performance of micro-electromechanical system (MEMS) gyroscopes is profoundly influenced by temperature. In this study, a novel approach is proposed to enhance the thermal performance of MEMS gyroscopes by compensating for the zero-rate output (ZRO) temperature drift error through internal multi...
Uloženo v:
| Vydáno v: | Measurement : journal of the International Measurement Confederation Ročník 257; s. 118892 |
|---|---|
| Hlavní autoři: | , , , , , |
| Médium: | Journal Article |
| Jazyk: | angličtina |
| Vydáno: |
Elsevier Ltd
15.01.2026
|
| Témata: | |
| ISSN: | 0263-2241 |
| On-line přístup: | Získat plný text |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!
|
| Abstract | The performance of micro-electromechanical system (MEMS) gyroscopes is profoundly influenced by temperature. In this study, a novel approach is proposed to enhance the thermal performance of MEMS gyroscopes by compensating for the zero-rate output (ZRO) temperature drift error through internal multi-parameter fusion calibration, without the need for additional temperature sensors. This method is applicable to all MEMS gyroscopes currently under investigation. The relationships between the ZRO temperature drift error and key gyroscope parameters — including drive mode resonant frequency, drive excitation voltage, quadrature suppression voltage, and reference source voltage — were analyzed, based on these relationships, a mathematical model for the full-temperature-range ZRO temperature drift error was established. By performing multi-parameters linear fusion compensation of ZRO using these four parameters, the temperature performance of ZRO was markedly improved. Experimental results demonstrate that, within the temperature range of -40 °C to 60 °C, the peak-to-peak value of ZRO was reduced from 0.7965°/s to 0.1168°/s, representing an 85% decrease. In comparison to single-parameter compensation using drive mode resonant frequency, drive excitation voltage, quadrature suppression voltage, and reference source voltage, wherein peak-to-peak values were reduced from 0.3916°/s, 0.3881°/s, 0.2028°/s, and 0.4174°/s to 0.1168°/s, multi-parameter fusion compensation achieved reductions of 70%, 70%, 42%, and 72%, respectively. Furthermore, full-temperature-range bias stability improved by an order of magnitude, decreasing from 0.301°/s to 0.022°/s after compensation.
•Proposes an innovative multi-parameter fusion method for compensating gyroscope zero rate output (ZRO).•Analyzes parameters causing gyroscope ZRO errors, and identifies error sources and compensation approaches.•Experimentally verifies the effectiveness and superiority of the proposed ZRO compensation method. |
|---|---|
| AbstractList | The performance of micro-electromechanical system (MEMS) gyroscopes is profoundly influenced by temperature. In this study, a novel approach is proposed to enhance the thermal performance of MEMS gyroscopes by compensating for the zero-rate output (ZRO) temperature drift error through internal multi-parameter fusion calibration, without the need for additional temperature sensors. This method is applicable to all MEMS gyroscopes currently under investigation. The relationships between the ZRO temperature drift error and key gyroscope parameters — including drive mode resonant frequency, drive excitation voltage, quadrature suppression voltage, and reference source voltage — were analyzed, based on these relationships, a mathematical model for the full-temperature-range ZRO temperature drift error was established. By performing multi-parameters linear fusion compensation of ZRO using these four parameters, the temperature performance of ZRO was markedly improved. Experimental results demonstrate that, within the temperature range of -40 °C to 60 °C, the peak-to-peak value of ZRO was reduced from 0.7965°/s to 0.1168°/s, representing an 85% decrease. In comparison to single-parameter compensation using drive mode resonant frequency, drive excitation voltage, quadrature suppression voltage, and reference source voltage, wherein peak-to-peak values were reduced from 0.3916°/s, 0.3881°/s, 0.2028°/s, and 0.4174°/s to 0.1168°/s, multi-parameter fusion compensation achieved reductions of 70%, 70%, 42%, and 72%, respectively. Furthermore, full-temperature-range bias stability improved by an order of magnitude, decreasing from 0.301°/s to 0.022°/s after compensation.
•Proposes an innovative multi-parameter fusion method for compensating gyroscope zero rate output (ZRO).•Analyzes parameters causing gyroscope ZRO errors, and identifies error sources and compensation approaches.•Experimentally verifies the effectiveness and superiority of the proposed ZRO compensation method. |
| ArticleNumber | 118892 |
| Author | Liu, Fumin Wang, Jianpeng Song, Ningfang Zhou, Yi Yang, Gongliu Cai, Qingzhong |
| Author_xml | – sequence: 1 givenname: Jianpeng orcidid: 0009-0008-3896-7387 surname: Wang fullname: Wang, Jianpeng organization: School of Instrument Science and OptoElectronics Engineering, Beihang University, Beijing, 100191, China – sequence: 2 givenname: Gongliu surname: Yang fullname: Yang, Gongliu organization: School of Mechanical Engineering, Zhejiang University, Hangzhou, 310058, Zhejiang, China – sequence: 3 givenname: Fumin surname: Liu fullname: Liu, Fumin organization: Beijing Institute of Aerospace Control Device, Beijing, 100854, China – sequence: 4 givenname: Qingzhong surname: Cai fullname: Cai, Qingzhong email: qingzhong_cai@buaa.edu.cn organization: School of Instrument Science and OptoElectronics Engineering, Beihang University, Beijing, 100191, China – sequence: 5 givenname: Ningfang surname: Song fullname: Song, Ningfang organization: School of Instrument Science and OptoElectronics Engineering, Beihang University, Beijing, 100191, China – sequence: 6 givenname: Yi surname: Zhou fullname: Zhou, Yi email: yizhou_mems@njust.edu.cn organization: School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, 210094, Jiangsu, China |
| BookMark | eNqNkMtqAjEUhrOwULV9h_QBZppk7ksRewFF6GXTTcgkZ2xkJhmSKLjouzfWLrrs6vDD-T9-vhmaGGsAoTtKUkpoeb9PBxD-4GAAE1JGWJFSWtcNm6ApYWWWMJbTazTzfk8IKbOmnKKvhcHaGHsUQR8BD4c-6GQUTgwQwOHu4LU1WNphBOPjTwyi31mnw-eAO-vwx8sWK6e7gG2HN6vNK96dnPXSjoAPRv0w-j4JEAlOhLgu0ozSZ5S_QVed6D3c_t45en9YvS2fkvX28Xm5WCeSlVVIFGtKChUpWiZZm1U5I7WqOhBF1uaEZkCrvFJ13XZ5o1RTNWXeVi0rJBENK0WWzVFz4co4zTvo-Oj0INyJU8LP7vie_3HHz-74xV3sLi9diAOPGhz3UoORoLQDGbiy-h-Ubx4chTU |
| Cites_doi | 10.1109/JMEMS.2024.3424810 10.1016/j.sna.2012.12.024 10.1109/JSEN.2024.3394902 10.1109/IBCAST.2016.7429889 10.1109/ITNEC52019.2021.9587304 10.1088/1361-6501/ade552 10.1109/ACCESS.2021.3094120 10.1016/j.measurement.2019.106947 10.1109/INERTIAL53425.2022.9787718 10.1109/INERTIAL63280.2025.11037137 10.1109/NEMS60219.2024.10639552 10.1109/TMECH.2019.2898098 10.1109/JSEN.2019.2902912 10.1109/TIM.2013.2283153 10.1109/JMEMS.2008.924253 10.1109/AIHCIR61661.2023.00034 10.1109/JSEN.2024.3360032 10.1016/j.measurement.2023.114051 10.3390/mi15070825 10.1109/ICSENST.2008.4757112 10.1016/j.measurement.2023.113331 10.1016/j.aei.2025.103300 10.1109/JSEN.2020.3012484 10.31438/trf.hh2012.77 10.1109/TIM.2020.3044339 10.1109/JSEN.2020.3044148 10.1109/JSEN.2024.3442207 10.1109/TIM.2019.2914295 10.1109/TED.2024.3392184 10.1016/j.ymssp.2015.11.004 10.1109/JSEN.2021.3126321 |
| ContentType | Journal Article |
| Copyright | 2025 Elsevier Ltd |
| Copyright_xml | – notice: 2025 Elsevier Ltd |
| DBID | AAYXX CITATION |
| DOI | 10.1016/j.measurement.2025.118892 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| ExternalDocumentID | 10_1016_j_measurement_2025_118892 S0263224125022511 |
| GroupedDBID | --K --M .~1 0R~ 1B1 1~. 1~5 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ 9JN AAEDT AAEDW AAIKJ AAKOC AALRI AAOAW AAQFI AATTM AAXKI AAXUO AAYWO ABFRF ABJNI ABMAC ABNEU ACDAQ ACFVG ACGFO ACGFS ACIWK ACLOT ACRLP ACVFH ADBBV ADCNI ADEZE ADTZH AEBSH AECPX AEFWE AEGXH AEIPS AEKER AENEX AEUPX AFJKZ AFPUW AFTJW AGHFR AGUBO AGYEJ AHHHB AHJVU AIEXJ AIGII AIIUN AIKHN AITUG AIVDX AKBMS AKRWK AKYEP ALMA_UNASSIGNED_HOLDINGS AMRAJ ANKPU APXCP AXJTR BJAXD BKOJK BLXMC CS3 DU5 EBS EFJIC EFKBS EFLBG EO8 EO9 EP2 EP3 FDB FIRID FNPLU FYGXN G-Q GBLVA IHE J1W JJJVA KOM LY7 M41 MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 RNS ROL RPZ SDF SDG SES SEW SPC SPCBC SPD SSQ SST SSZ T5K ZMT ~G- ~HD 29M 9DU AAYXX ABFNM ABXDB ACNNM ASPBG AVWKF AZFZN CITATION EJD FEDTE FGOYB G-2 HVGLF HZ~ R2- SET WUQ XPP |
| ID | FETCH-LOGICAL-c267t-d2961e705b2c2b374208d7fea53b4013e1747d88bf49dd97964b7b25c0a926a33 |
| ISICitedReferencesCount | 0 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=001576932700006&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 0263-2241 |
| IngestDate | Sat Nov 29 06:58:03 EST 2025 Sat Nov 29 17:15:29 EST 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | MEMS gyroscopes Temperature performance Multi-parameter fusion Bias stability |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c267t-d2961e705b2c2b374208d7fea53b4013e1747d88bf49dd97964b7b25c0a926a33 |
| ORCID | 0009-0008-3896-7387 |
| ParticipantIDs | crossref_primary_10_1016_j_measurement_2025_118892 elsevier_sciencedirect_doi_10_1016_j_measurement_2025_118892 |
| PublicationCentury | 2000 |
| PublicationDate | 2026-01-15 |
| PublicationDateYYYYMMDD | 2026-01-15 |
| PublicationDate_xml | – month: 01 year: 2026 text: 2026-01-15 day: 15 |
| PublicationDecade | 2020 |
| PublicationTitle | Measurement : journal of the International Measurement Confederation |
| PublicationYear | 2026 |
| Publisher | Elsevier Ltd |
| Publisher_xml | – name: Elsevier Ltd |
| References | Zhou, Yu, Ke, Ge, Huang, Wang, Zhou, Su (b11) 2024; 33 M. Ali, Compensation of temperature and acceleration effects on MEMS gyroscope, in: 2016 13th International Bhurban Conference on Applied Sciences and Technology, IBCAST, 2016, pp. 274–279. Y. Zhang, L. Piao, Y. Wang, Compensation of Temperature Drift of Micro Gyroscope by Polynomial Fitting Algorithm, in: 2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference, ITNEC, Vol. 5, 2021, pp. 307–310. I. Prikhodko, A. Trusov, A. Shkel, Achieving long-term bias stability in high-q inertialmems by temperature self-sensing with 0.5millicelcius precision, in: Solid State Sensors, Actuators, and Microsystems Workshop, 2012. Mustafa, Cheng, Oelmann (b10) 2014; 63 J. Ren, T. Zhou, Y. Zhou, Y. Li, Y. Su, A Quality Factor Matching Method for MEMS Disk Resonator Gyroscope in Rate Mode, in: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, 2024, pp. 1–4. Li, Cui, Cai, Wei, Shen, Tang, Shi, Cao, Liu (b35) 2024; 24 Schiwietz, Weig, Degenfeld-Schonburg (b42) 2023 Gu, Liu, Zhao, Zhou (b33) 2019; 19 Kim, Hopcroft, Candler, Jha, Agarwal, Melamud, Chandorkar, Yama, Kenny (b43) 2008; 17 D.D. Lynch, Vibratory Gyro Analysis by the Method of Averaging, in: Proc. 2nd St. Petersburg Conf. on Gyroscopic Technology and Navigation, St. Petersburg, Russia, 1995, pp. 26–34. Cao, Zhang, Han, Shao, Gao, Huang, Shi, Tang, Shen, Liu (b20) 2019; 24 Erkan, Tatar (b24) 2024 Wang, Yang, Zhou, Zhang, Liu, Cai (b14) 2024; 15 Z. Hou, G. Liu, M. Zeng, X. Chen, D. Xiao, X. Wu, Analysis and Compensation of Phase Error for the Butterfly Gyroscope, in: 2025 IEEE International Symposium on Inertial Sensors and Systems, INERTIAL, 2025, pp. 1–4. Cui, Yan, Zhao (b37) 2019; 148 Capriglione, Carratù, Catelani, Ciani, Patrizi, Pietrosanto, Sommella (b9) 2021; 70 Ding (b1) 2023; 22 Chong, Rui, Jie, Xiaoming, Jun, Yunbo, Jun, Huiliang (b25) 2016; 72–73 Li, Wen, Wisher, Norouzpour-Shirazi, Lei, Chen, Ayazi (b5) 2020; 69 Ding (b2) 2023; 22 Liu, Ding, Ding, Shang, Yu, Li (b19) 2025; 74 Ge, Jiang, Zhou, Huang, Su, Zhou (b16) 2025; 74 Ren, Zhou, Zhou, Li, Su (b7) 2023; 72 D. Liu, X. Chi, J. Cui, L. Lin, Q. Zhao, Z. Yang, G. Yan, Research on temperature dependent characteristics and compensation methods for digital gyroscope, in: 2008 3rd International Conference on Sensing Technology, 2008, pp. 273–277. Prikhodko, Trusov, Shkel (b36) 2013; 201 Cao, Wei, Liu, Ma, Zhang, Zhang, Shen, Duan (b18) 2021; 9 T. Dong, B. Chai, T. Wang, A MEMS Gyroscope Arrays Error Calibration Method Based on LSTM, in: 2023 2nd International Conference on Artificial Intelligence, Human-Computer Interaction and Robotics, AIHCIR, 2023, pp. 161–165. J. Fei, S. Wang, M. Hua, Adaptive fuzzy control of MEMS gyroscope using T-S fuzzy model, in: Proceedings of the 32nd Chinese Control Conference, 2013, pp. 3104–3109. Zhang, Jiang, Yang, Li (b30) 2025; 36 Zhang, Chen, Yin, Fu (b17) 2023; 220 Zhou, Ren, Liu, Zhou, Su (b13) 2021; 21 Huang, Wang, Xing, Gao (b32) 2022; 71 Zhou, Ke, Ge, Huang, Zhou, Su (b3) 2024; 24 Jia, Ding, Qin, Ruan, Li (b15) 2021; 21 Wang, Cao, Li, Dean (b21) 2021; 21 Chen, Ding, Qin, Li (b8) 2024; 73 W. Guan, D. Wang, M.H. Asadian, Y. Wang, A.M. Shkel, Effect of Geometry on Energy Losses In Fused Silica Dual-Shell Gyroscopes, in: 2022 IEEE International Symposium on Inertial Sensors and Systems, INERTIAL, 2022, pp. 1–4. Yi, Yang, Cai, Cheng, Tu, Wang, Song (b4) 2024; 24 Zhang, Xu, Yang, Wang, Zheng, Li (b29) 2024; 225 Acar, Shkel (b41) 2008 Liu, Li, Chen, Khan (b28) 2025; 65 Wang, Zhou, Jiang, Zhang, Zhou, Su (b23) 2024; 71 10.1016/j.measurement.2025.118892_b40 10.1016/j.measurement.2025.118892_b22 Capriglione (10.1016/j.measurement.2025.118892_b9) 2021; 70 Liu (10.1016/j.measurement.2025.118892_b19) 2025; 74 10.1016/j.measurement.2025.118892_b26 Ding (10.1016/j.measurement.2025.118892_b2) 2023; 22 Ren (10.1016/j.measurement.2025.118892_b7) 2023; 72 Gu (10.1016/j.measurement.2025.118892_b33) 2019; 19 Yi (10.1016/j.measurement.2025.118892_b4) 2024; 24 10.1016/j.measurement.2025.118892_b6 Wang (10.1016/j.measurement.2025.118892_b14) 2024; 15 10.1016/j.measurement.2025.118892_b27 Huang (10.1016/j.measurement.2025.118892_b32) 2022; 71 Li (10.1016/j.measurement.2025.118892_b5) 2020; 69 Cui (10.1016/j.measurement.2025.118892_b37) 2019; 148 Mustafa (10.1016/j.measurement.2025.118892_b10) 2014; 63 Zhang (10.1016/j.measurement.2025.118892_b17) 2023; 220 Kim (10.1016/j.measurement.2025.118892_b43) 2008; 17 Zhou (10.1016/j.measurement.2025.118892_b11) 2024; 33 Wang (10.1016/j.measurement.2025.118892_b21) 2021; 21 Zhang (10.1016/j.measurement.2025.118892_b29) 2024; 225 Schiwietz (10.1016/j.measurement.2025.118892_b42) 2023 Ge (10.1016/j.measurement.2025.118892_b16) 2025; 74 Chen (10.1016/j.measurement.2025.118892_b8) 2024; 73 10.1016/j.measurement.2025.118892_b31 Acar (10.1016/j.measurement.2025.118892_b41) 2008 Ding (10.1016/j.measurement.2025.118892_b1) 2023; 22 Jia (10.1016/j.measurement.2025.118892_b15) 2021; 21 Zhou (10.1016/j.measurement.2025.118892_b13) 2021; 21 10.1016/j.measurement.2025.118892_b12 10.1016/j.measurement.2025.118892_b34 Zhang (10.1016/j.measurement.2025.118892_b30) 2025; 36 Li (10.1016/j.measurement.2025.118892_b35) 2024; 24 10.1016/j.measurement.2025.118892_b39 Wang (10.1016/j.measurement.2025.118892_b23) 2024; 71 10.1016/j.measurement.2025.118892_b38 Liu (10.1016/j.measurement.2025.118892_b28) 2025; 65 Erkan (10.1016/j.measurement.2025.118892_b24) 2024 Prikhodko (10.1016/j.measurement.2025.118892_b36) 2013; 201 Cao (10.1016/j.measurement.2025.118892_b18) 2021; 9 Cao (10.1016/j.measurement.2025.118892_b20) 2019; 24 Zhou (10.1016/j.measurement.2025.118892_b3) 2024; 24 Chong (10.1016/j.measurement.2025.118892_b25) 2016; 72–73 |
| References_xml | – reference: J. Fei, S. Wang, M. Hua, Adaptive fuzzy control of MEMS gyroscope using T-S fuzzy model, in: Proceedings of the 32nd Chinese Control Conference, 2013, pp. 3104–3109. – volume: 71 year: 2022 ident: b32 article-title: A MEMS IMU gyroscope calibration method based on deep learning publication-title: IEEE Trans. Instrum. Meas. – volume: 24 start-page: 7614 year: 2024 end-page: 7624 ident: b35 article-title: A fusion algorithm for real-time temperature compensation and noise suppression with a double U-beam vibration ring gyroscope publication-title: IEEE Sens. J. – volume: 33 start-page: 646 year: 2024 end-page: 655 ident: b11 article-title: A rapid circuit phase error identification and compensation method for MEMS QMG achieving 99.7% reduction in ZRO drift publication-title: J. Microelectromech. Syst. – volume: 65 year: 2025 ident: b28 article-title: Neuromorphic computing-enabled generalized machine fault diagnosis with dynamic vision publication-title: Adv. Eng. Inform. – reference: J. Ren, T. Zhou, Y. Zhou, Y. Li, Y. Su, A Quality Factor Matching Method for MEMS Disk Resonator Gyroscope in Rate Mode, in: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, 2024, pp. 1–4. – reference: D.D. Lynch, Vibratory Gyro Analysis by the Method of Averaging, in: Proc. 2nd St. Petersburg Conf. on Gyroscopic Technology and Navigation, St. Petersburg, Russia, 1995, pp. 26–34. – volume: 63 start-page: 2591 year: 2014 end-page: 2598 ident: b10 article-title: Stator-free low angular speed sensor based on a MEMS gyroscope publication-title: IEEE Trans. Instrum. Meas. – volume: 36 year: 2025 ident: b30 article-title: Federated transfer learning for remaining useful life prediction in prognostics with data privacy publication-title: Meas. Sci. Technol. – reference: T. Dong, B. Chai, T. Wang, A MEMS Gyroscope Arrays Error Calibration Method Based on LSTM, in: 2023 2nd International Conference on Artificial Intelligence, Human-Computer Interaction and Robotics, AIHCIR, 2023, pp. 161–165. – volume: 72–73 start-page: 897 year: 2016 end-page: 905 ident: b25 article-title: Temperature drift modeling of MEMS gyroscope based on genetic-Elman neural network publication-title: Mech. Syst. Signal Process. – volume: 74 start-page: 1 year: 2025 end-page: 12 ident: b19 article-title: Bandwidth expansion for mode-matched MEMS gyroscopes without any compensator publication-title: IEEE Trans. Instrum. Meas. – volume: 70 start-page: 1 year: 2021 end-page: 10 ident: b9 article-title: Experimental analysis of filtering algorithms for IMU-based applications under vibrations publication-title: IEEE Trans. Instrum. Meas. – volume: 220 year: 2023 ident: b17 article-title: Design of MEMS gyroscope interface ASIC with on-chip temperature compensation publication-title: Measurement – volume: 19 start-page: 5070 year: 2019 end-page: 5077 ident: b33 article-title: The in-operation drift compensation of MEMS gyroscope based on bagging-ELM and improved CEEMDAN publication-title: IEEE Sens. J. – volume: 148 year: 2019 ident: b37 article-title: Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method publication-title: Measurement – volume: 24 start-page: 31827 year: 2024 end-page: 31836 ident: b4 article-title: A novel self-modulation method for whole-angle resonator gyroscope based on high harmonic compensation publication-title: IEEE Sens. J. – volume: 71 start-page: 3888 year: 2024 end-page: 3894 ident: b23 article-title: A compact temperature controller for MEMS vibratory gyroscopes using thermoelectric cooler publication-title: IEEE Trans. Electron Devices – volume: 201 start-page: 517 year: 2013 end-page: 524 ident: b36 article-title: Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing publication-title: Sens. Actuators A: Phys. – reference: D. Liu, X. Chi, J. Cui, L. Lin, Q. Zhao, Z. Yang, G. Yan, Research on temperature dependent characteristics and compensation methods for digital gyroscope, in: 2008 3rd International Conference on Sensing Technology, 2008, pp. 273–277. – volume: 15 year: 2024 ident: b14 article-title: An in-run automatic demodulation phase error compensation method for MEMS gyroscope in full temperature range publication-title: Micromachines – volume: 21 start-page: 92 year: 2021 end-page: 119 ident: b21 article-title: Concepts, roadmaps and challenges of ovenized MEMS gyroscopes: A review publication-title: IEEE Sens. J. – reference: Z. Hou, G. Liu, M. Zeng, X. Chen, D. Xiao, X. Wu, Analysis and Compensation of Phase Error for the Butterfly Gyroscope, in: 2025 IEEE International Symposium on Inertial Sensors and Systems, INERTIAL, 2025, pp. 1–4. – reference: I. Prikhodko, A. Trusov, A. Shkel, Achieving long-term bias stability in high-q inertialmems by temperature self-sensing with 0.5millicelcius precision, in: Solid State Sensors, Actuators, and Microsystems Workshop, 2012. – year: 2008 ident: b41 article-title: MEMS vibratory gyroscopes: Structural approaches to improve robustness (MEMS reference shelf) – volume: 21 start-page: 7316 year: 2021 end-page: 7325 ident: b15 article-title: In-run scale factor compensation for MEMS gyroscope without calibration and fitting publication-title: IEEE Sens. J. – start-page: 1 year: 2024 end-page: 4 ident: b24 article-title: Improving the temperature stability of MEMS gyroscope bias with on-chip stress sensors publication-title: 2024 IEEE International Symposium on Inertial Sensors and Systems – volume: 73 start-page: 1 year: 2024 end-page: 14 ident: b8 article-title: Modeling, characterization, and compensation of detection and actuation coupling errors for whole-angle micro hemispherical resonant gyroscope publication-title: IEEE Trans. Instrum. Meas. – volume: 22 start-page: 1 year: 2023 end-page: 4 ident: b2 article-title: Using entropy theory to guide the development of gyroscopes publication-title: Navig. Control. – volume: 69 start-page: 1783 year: 2020 end-page: 1793 ident: b5 article-title: An FPGA-based interface system for high-frequency bulk-acoustic-wave microgyroscopes with in-run automatic mode-matching publication-title: IEEE Trans. Instrum. Meas. – reference: Y. Zhang, L. Piao, Y. Wang, Compensation of Temperature Drift of Micro Gyroscope by Polynomial Fitting Algorithm, in: 2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference, ITNEC, Vol. 5, 2021, pp. 307–310. – reference: M. Ali, Compensation of temperature and acceleration effects on MEMS gyroscope, in: 2016 13th International Bhurban Conference on Applied Sciences and Technology, IBCAST, 2016, pp. 274–279. – volume: 21 start-page: 27601 year: 2021 end-page: 27611 ident: b13 article-title: An in-run automatic mode-matching method for N=3 MEMS disk resonator gyroscope publication-title: IEEE Sens. J. – volume: 74 start-page: 1 year: 2025 end-page: 11 ident: b16 article-title: A novel MEMS quadruple mass gyroscope with superior overall performance via dual-umbrella-like driving architecture publication-title: IEEE Trans. Instrum. Meas. – start-page: 877 year: 2023 end-page: 880 ident: b42 article-title: Temperature dependence of quality factors at high frequencies in MEMS gyroscopes publication-title: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems – reference: W. Guan, D. Wang, M.H. Asadian, Y. Wang, A.M. Shkel, Effect of Geometry on Energy Losses In Fused Silica Dual-Shell Gyroscopes, in: 2022 IEEE International Symposium on Inertial Sensors and Systems, INERTIAL, 2022, pp. 1–4. – volume: 225 year: 2024 ident: b29 article-title: Data-driven deep learning approach for thrust prediction of solid rocket motors publication-title: Measurement – volume: 22 start-page: 1 year: 2023 end-page: 4 ident: b1 article-title: Three decades of evolving MEMS inertial sensors publication-title: Navig. Control. – volume: 9 start-page: 95180 year: 2021 end-page: 95193 ident: b18 article-title: A temperature compensation approach for dual-mass MEMS gyroscope based on PE-LCD and ANFIS publication-title: IEEE Access – volume: 72 start-page: 1 year: 2023 end-page: 11 ident: b7 article-title: An in-run automatic mode-matching method with amplitude correction and phase compensation for MEMS disk resonator gyroscope publication-title: IEEE Trans. Instrum. Meas. – volume: 17 start-page: 755 year: 2008 end-page: 766 ident: b43 article-title: Temperature dependence of quality factor in MEMS resonators publication-title: J. Microelectromech. Syst. – volume: 24 start-page: 677 year: 2019 end-page: 688 ident: b20 article-title: Pole-zero temperature compensation circuit design and experiment for dual-mass MEMS gyroscope bandwidth expansion publication-title: IEEE/ASME Trans. Mechatronics – volume: 24 start-page: 19262 year: 2024 end-page: 19273 ident: b3 article-title: An automatic phase error compensation method for MEMS quad mass gyroscope publication-title: IEEE Sens. J. – volume: 72 start-page: 1 year: 2023 ident: 10.1016/j.measurement.2025.118892_b7 article-title: An in-run automatic mode-matching method with amplitude correction and phase compensation for MEMS disk resonator gyroscope publication-title: IEEE Trans. Instrum. Meas. – volume: 74 start-page: 1 year: 2025 ident: 10.1016/j.measurement.2025.118892_b16 article-title: A novel MEMS quadruple mass gyroscope with superior overall performance via dual-umbrella-like driving architecture publication-title: IEEE Trans. Instrum. Meas. – volume: 33 start-page: 646 issue: 5 year: 2024 ident: 10.1016/j.measurement.2025.118892_b11 article-title: A rapid circuit phase error identification and compensation method for MEMS QMG achieving 99.7% reduction in ZRO drift publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2024.3424810 – volume: 201 start-page: 517 year: 2013 ident: 10.1016/j.measurement.2025.118892_b36 article-title: Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing publication-title: Sens. Actuators A: Phys. doi: 10.1016/j.sna.2012.12.024 – volume: 24 start-page: 19262 issue: 12 year: 2024 ident: 10.1016/j.measurement.2025.118892_b3 article-title: An automatic phase error compensation method for MEMS quad mass gyroscope publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2024.3394902 – ident: 10.1016/j.measurement.2025.118892_b27 doi: 10.1109/IBCAST.2016.7429889 – volume: 74 start-page: 1 year: 2025 ident: 10.1016/j.measurement.2025.118892_b19 article-title: Bandwidth expansion for mode-matched MEMS gyroscopes without any compensator publication-title: IEEE Trans. Instrum. Meas. – ident: 10.1016/j.measurement.2025.118892_b26 doi: 10.1109/ITNEC52019.2021.9587304 – year: 2008 ident: 10.1016/j.measurement.2025.118892_b41 – volume: 36 issue: 7 year: 2025 ident: 10.1016/j.measurement.2025.118892_b30 article-title: Federated transfer learning for remaining useful life prediction in prognostics with data privacy publication-title: Meas. Sci. Technol. doi: 10.1088/1361-6501/ade552 – volume: 9 start-page: 95180 year: 2021 ident: 10.1016/j.measurement.2025.118892_b18 article-title: A temperature compensation approach for dual-mass MEMS gyroscope based on PE-LCD and ANFIS publication-title: IEEE Access doi: 10.1109/ACCESS.2021.3094120 – volume: 148 year: 2019 ident: 10.1016/j.measurement.2025.118892_b37 article-title: Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method publication-title: Measurement doi: 10.1016/j.measurement.2019.106947 – ident: 10.1016/j.measurement.2025.118892_b6 doi: 10.1109/INERTIAL53425.2022.9787718 – start-page: 1 year: 2024 ident: 10.1016/j.measurement.2025.118892_b24 article-title: Improving the temperature stability of MEMS gyroscope bias with on-chip stress sensors – volume: 71 year: 2022 ident: 10.1016/j.measurement.2025.118892_b32 article-title: A MEMS IMU gyroscope calibration method based on deep learning publication-title: IEEE Trans. Instrum. Meas. – ident: 10.1016/j.measurement.2025.118892_b22 doi: 10.1109/INERTIAL63280.2025.11037137 – ident: 10.1016/j.measurement.2025.118892_b12 doi: 10.1109/NEMS60219.2024.10639552 – volume: 24 start-page: 677 issue: 2 year: 2019 ident: 10.1016/j.measurement.2025.118892_b20 article-title: Pole-zero temperature compensation circuit design and experiment for dual-mass MEMS gyroscope bandwidth expansion publication-title: IEEE/ASME Trans. Mechatronics doi: 10.1109/TMECH.2019.2898098 – volume: 19 start-page: 5070 issue: 13 year: 2019 ident: 10.1016/j.measurement.2025.118892_b33 article-title: The in-operation drift compensation of MEMS gyroscope based on bagging-ELM and improved CEEMDAN publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2019.2902912 – volume: 63 start-page: 2591 issue: 11 year: 2014 ident: 10.1016/j.measurement.2025.118892_b10 article-title: Stator-free low angular speed sensor based on a MEMS gyroscope publication-title: IEEE Trans. Instrum. Meas. doi: 10.1109/TIM.2013.2283153 – volume: 17 start-page: 755 issue: 3 year: 2008 ident: 10.1016/j.measurement.2025.118892_b43 article-title: Temperature dependence of quality factor in MEMS resonators publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2008.924253 – ident: 10.1016/j.measurement.2025.118892_b31 doi: 10.1109/AIHCIR61661.2023.00034 – ident: 10.1016/j.measurement.2025.118892_b34 – volume: 22 start-page: 1 issue: 3 year: 2023 ident: 10.1016/j.measurement.2025.118892_b2 article-title: Using entropy theory to guide the development of gyroscopes publication-title: Navig. Control. – volume: 24 start-page: 7614 issue: 6 year: 2024 ident: 10.1016/j.measurement.2025.118892_b35 article-title: A fusion algorithm for real-time temperature compensation and noise suppression with a double U-beam vibration ring gyroscope publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2024.3360032 – volume: 225 year: 2024 ident: 10.1016/j.measurement.2025.118892_b29 article-title: Data-driven deep learning approach for thrust prediction of solid rocket motors publication-title: Measurement doi: 10.1016/j.measurement.2023.114051 – volume: 15 issue: 7 year: 2024 ident: 10.1016/j.measurement.2025.118892_b14 article-title: An in-run automatic demodulation phase error compensation method for MEMS gyroscope in full temperature range publication-title: Micromachines doi: 10.3390/mi15070825 – volume: 22 start-page: 1 issue: 4 year: 2023 ident: 10.1016/j.measurement.2025.118892_b1 article-title: Three decades of evolving MEMS inertial sensors publication-title: Navig. Control. – ident: 10.1016/j.measurement.2025.118892_b38 doi: 10.1109/ICSENST.2008.4757112 – ident: 10.1016/j.measurement.2025.118892_b40 – volume: 220 year: 2023 ident: 10.1016/j.measurement.2025.118892_b17 article-title: Design of MEMS gyroscope interface ASIC with on-chip temperature compensation publication-title: Measurement doi: 10.1016/j.measurement.2023.113331 – volume: 65 year: 2025 ident: 10.1016/j.measurement.2025.118892_b28 article-title: Neuromorphic computing-enabled generalized machine fault diagnosis with dynamic vision publication-title: Adv. Eng. Inform. doi: 10.1016/j.aei.2025.103300 – volume: 21 start-page: 92 issue: 1 year: 2021 ident: 10.1016/j.measurement.2025.118892_b21 article-title: Concepts, roadmaps and challenges of ovenized MEMS gyroscopes: A review publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2020.3012484 – ident: 10.1016/j.measurement.2025.118892_b39 doi: 10.31438/trf.hh2012.77 – volume: 70 start-page: 1 year: 2021 ident: 10.1016/j.measurement.2025.118892_b9 article-title: Experimental analysis of filtering algorithms for IMU-based applications under vibrations publication-title: IEEE Trans. Instrum. Meas. doi: 10.1109/TIM.2020.3044339 – volume: 21 start-page: 7316 issue: 6 year: 2021 ident: 10.1016/j.measurement.2025.118892_b15 article-title: In-run scale factor compensation for MEMS gyroscope without calibration and fitting publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2020.3044148 – start-page: 877 year: 2023 ident: 10.1016/j.measurement.2025.118892_b42 article-title: Temperature dependence of quality factors at high frequencies in MEMS gyroscopes – volume: 24 start-page: 31827 issue: 20 year: 2024 ident: 10.1016/j.measurement.2025.118892_b4 article-title: A novel self-modulation method for whole-angle resonator gyroscope based on high harmonic compensation publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2024.3442207 – volume: 69 start-page: 1783 issue: 4 year: 2020 ident: 10.1016/j.measurement.2025.118892_b5 article-title: An FPGA-based interface system for high-frequency bulk-acoustic-wave microgyroscopes with in-run automatic mode-matching publication-title: IEEE Trans. Instrum. Meas. doi: 10.1109/TIM.2019.2914295 – volume: 71 start-page: 3888 issue: 6 year: 2024 ident: 10.1016/j.measurement.2025.118892_b23 article-title: A compact temperature controller for MEMS vibratory gyroscopes using thermoelectric cooler publication-title: IEEE Trans. Electron Devices doi: 10.1109/TED.2024.3392184 – volume: 72–73 start-page: 897 year: 2016 ident: 10.1016/j.measurement.2025.118892_b25 article-title: Temperature drift modeling of MEMS gyroscope based on genetic-Elman neural network publication-title: Mech. Syst. Signal Process. doi: 10.1016/j.ymssp.2015.11.004 – volume: 21 start-page: 27601 issue: 24 year: 2021 ident: 10.1016/j.measurement.2025.118892_b13 article-title: An in-run automatic mode-matching method for N=3 MEMS disk resonator gyroscope publication-title: IEEE Sens. J. doi: 10.1109/JSEN.2021.3126321 – volume: 73 start-page: 1 year: 2024 ident: 10.1016/j.measurement.2025.118892_b8 article-title: Modeling, characterization, and compensation of detection and actuation coupling errors for whole-angle micro hemispherical resonant gyroscope publication-title: IEEE Trans. Instrum. Meas. |
| SSID | ssj0006396 |
| Score | 2.4193423 |
| Snippet | The performance of micro-electromechanical system (MEMS) gyroscopes is profoundly influenced by temperature. In this study, a novel approach is proposed to... |
| SourceID | crossref elsevier |
| SourceType | Index Database Publisher |
| StartPage | 118892 |
| SubjectTerms | Bias stability MEMS gyroscopes Multi-parameter fusion Temperature performance |
| Title | An innovative multi-parameter fusion compensation algorithm for ZRO drift of MEMS gyroscope under full-temperature conditions |
| URI | https://dx.doi.org/10.1016/j.measurement.2025.118892 |
| Volume | 257 |
| WOSCitedRecordID | wos001576932700006&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVESC databaseName: Elsevier SD Freedom Collection Journals 2021 issn: 0263-2241 databaseCode: AIEXJ dateStart: 19950101 customDbUrl: isFulltext: true dateEnd: 99991231 titleUrlDefault: https://www.sciencedirect.com omitProxy: false ssIdentifier: ssj0006396 providerName: Elsevier |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1ba9RAFB7WVkUfRGvFemME30pKM7lMAr4sZasWrbeqiy9hJjPZpuwmy96ogj_Kf9hzZnJjVVTEl7CEzUk252PmnLPf-Q4hT1JY8xQXytFCCMeXoe-INBaOckMdhVkgffOP6ceX_Pg4Gg7jN73e97oXZjXmRRGdn8fT_-pqOAfOxtbZv3B3YxROwGdwOhzB7XD8I8f3kbtoR52utCUMOijwPUHiy262xPKYYZJDAmu9L8ajcpYvTieGc_j53etdNcszQxF4NYBEf_QFJS_LqTZDc9HGeOygplUlyIzUdZW3lb96QFRbfjSFh45IRUvZrGuR3S-bLkRUBO2SBD5Vhe0jwDM8-qhZrqrzz0psSF42BKN8aeLy5SRvTBzY0dtvYbf-elpWJqqKBzMVD9vzactwdStOy3uaGwVZz8F4pLu0Myt-_cM2YSsWZ3uT9rftwZ0C2ECiyM7mW1Phfo_20TyEjAzTsktkk_EghoV0s_9iMDxqtn8I-UJb2LPPc5U8bkmFv7jhz4OiTqBzcpPcqDIU2rfIukV6utgi1zu6lVvkiuENp_Pb5Fu_oC3a6BraqEUb7aKNNmijgDYKaKMGbbTMKKKNNmijBm10HW20Rds2-XA4ODl47lQTPZyUhXzhKBaHrub7gWQpkx5HbofimRaBJzHR15AfcxVFMvNjpWJsk5ZcsiDdFzELhefdIRtFWei7hLoSthshIP_mri-8QKSRq4NApTJD0Um1Q1j9SpOpFW5JakbjWdLxQ4J-SKwfdsjT-uUnVQRqI8sEkPP7y-_92-X3ybUW7g_IxmK21A_J5XS1yOezRxXOLgA6hbt3 |
| linkProvider | Elsevier |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=An+innovative+multi-parameter+fusion+compensation+algorithm+for+ZRO+drift+of+MEMS+gyroscope+under+full-temperature+conditions&rft.jtitle=Measurement+%3A+journal+of+the+International+Measurement+Confederation&rft.au=Wang%2C+Jianpeng&rft.au=Yang%2C+Gongliu&rft.au=Liu%2C+Fumin&rft.au=Cai%2C+Qingzhong&rft.date=2026-01-15&rft.pub=Elsevier+Ltd&rft.issn=0263-2241&rft.volume=257&rft_id=info:doi/10.1016%2Fj.measurement.2025.118892&rft.externalDocID=S0263224125022511 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0263-2241&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0263-2241&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0263-2241&client=summon |