Design and implementation of a real-time compensation algorithm for nonlinear error based on ellipse fitting

To improve the measurement accuracy of interferometer displacement measurement systems, this study analyzes the characteristics of the interference signal to identify sources of nonlinear errors and develops compensation strategies. Specifically, a model is established for the nonlinear errors of th...

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Bibliographic Details
Published in:	Optics express Vol. 31; no. 18; p. 29255
Main Authors:	Xiong, Xianming, Zhou, Fangjun, Du, Hao, Zhang, Wentao, Zhao, Zhengyi, Chen, Wenwei, Guo, Xin, Xu, Le
Format:	Journal Article
Language:	English
Published:	28.08.2023
ISSN:	1094-4087, 1094-4087
Online Access:	Get full text
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