Probabilistic Generative Approach for Ambiguity-Aware Parameter Extraction

Artificial neural networks (ANNs) are increasingly used for parameter extraction in semiconductor device modeling. However, in practice, a parameter ambiguity issue arises, where multiple parameter combinations produce identical drain current values (<inline-formula> <tex-math notation=&quo...

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Veröffentlicht in:IEEE transactions on electron devices Jg. 72; H. 10; S. 5544 - 5550
Hauptverfasser: Zeng, Bolun, Tang, Zhenhua, Zhang, Yuanke, Li, Qingsong, Zhou, Changchun, Qiu, Liling, Chen, Yuefeng, Xiang, Zikun, Xu, Jun, Luo, Chao, Guo, Guoping
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York IEEE 01.10.2025
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
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ISSN:0018-9383, 1557-9646
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Zusammenfassung:Artificial neural networks (ANNs) are increasingly used for parameter extraction in semiconductor device modeling. However, in practice, a parameter ambiguity issue arises, where multiple parameter combinations produce identical drain current values (<inline-formula> <tex-math notation="LaTeX">{I}_{\text {DS}} </tex-math></inline-formula>). To address this challenge, we introduce a novel probabilistic generative framework. Specifically, we utilize a conditional variational autoencoder (CVAE) to learn the latent distribution of ambiguous parameters (e.g., threshold voltage and mobility) and generate diverse possible candidate parameter sets conditioned on <inline-formula> <tex-math notation="LaTeX">{I}_{\text {DS}} </tex-math></inline-formula> characteristics. By validating the <inline-formula> <tex-math notation="LaTeX">{I}_{\text {DS}} </tex-math></inline-formula> characteristics of the candidates, we ultimately select the optimal parameter set. Experiments across different device sizes, process technologies, and operating conditions demonstrate the effectiveness of our model.
Bibliographie:ObjectType-Article-1
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ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2025.3594676